Hitachi High-tech Corporation

Honda Motor Co., Ltd.

Hitachi-high-technologies Corporation

Sony Corporation

Sony Group Corporation

Satoshi Takada

Natsuki Tsuno

Kyosuke Miyoshi

Hideaki Sakai

Takuya Higuchi

Akira Fukuda

Yasuhiro Shirasaki

Akira Hirai

Tsuyoshi Harata

Muneyuki Fukuda

Kazuo Aoki

Kosuke Matsumoto

Yohei Nakamura

Daisuke Bizen

Minami Shouji

Shoshi Hidaka

Yoshiatsu Asai

Ryu Tate

Hiroyuki Ito

Makoto Suzuki

Naomasa Suzuki

Satoru Yamaguchi

Makoto Sakakibara

Noritsugu Takahashi

Kei Sakai

Masashi Sakamoto

Miki Isawa

Masami Ikota

Kazuhisa Hasumi

Hirohiko Kitsuki

Atsuko Fukada

Naoko Takeda

Takehiko Konno

Miyuki Fukuda

Yuto Hattori

Takashi Nobuhara

Kozo Miyake

Hideki Nakayama

Fuminori Nohara

Tatsuichi Katou

Shota Mitsugi

Junichi Fuse

Yuya Isomae

Takayuki Hoshino

Provided is a technique and the like capable of specifying irradiation areas or irradiation positions of a beam and a light as clearly as possible. A charged particle beam apparatusincludes: a position adjustment markprovided on a stageand irradiated with a beam bl and a light a; and a mechanism setting an irradiation position of the beam bl and an irradiation position of the light awith respect to the stageand changing a relative positional relationship including a distance between the irradiation position of the light aand the stage. A computer systemgenerates a first image in which the position adjustment markis reflected based on a first detection signal obtained by irradiating the position adjustment markwith the beam b, generates a second image in which an irradiation area of the light ais reflected in the vicinity of the position adjustment markbased on a second detection signal obtained by irradiating the position adjustment markwith the light a, and adjusts an irradiation position of the beam band an irradiation position of the light abased on the first image and the second image obtained when a positional relationship is changed by the mechanism.

Charged particle beam apparatus

An imaging device includes a control unit configured to, before starting processing of reading a pixel signal forming a still image to be recorded from an imaging element in a case where an operation for still image imaging and recording is performed, calculates displayable timing in a display unit for the still image, and performs display setting processing according to the calculated displayable timing.

Imaging device and imaging control method

A configuration is provided so as to enable efficient fixing of cell groups to a housing of a battery pack. A housing of a battery pack has inside thereof a partition wall which extends in an extending direction and projects in a projecting direction. A cell group has a plurality of battery cells side-by-side in the extending direction one a side of the partition wall. Paste is filled into a gap between the partition wall and the cell group. The partition wall has an injection channel. The injection channel has an injection port for injecting the paste, and an inlet which communicates with the injection port and opens to the gap.

Battery pack

A charged particle optical system scans a sample with a pulsed charged particle beam and detects secondary charged particles; and a scan image is formed. Control is carried out so that a deflection signal for deflecting the charged particle beam in a first direction, a first timing for pulsed irradiation, a second timing for pulsed irradiation, and a third timing for detection of the secondary charged particles are synchronized. When the deflection amount of the charged particle beam in the time period of the first timing corresponds to the coordinates of n pixels in the scan image, the same line is scanned m times (m<n) while shifting the first timing with respect to the deflection signal so that a location irradiated with the charged particle beam by each scanning has different pixel coordinates. The pixel values at pixel coordinates where a signal is defective are restored.

Charged particle beam device and sample observation method

A battery device is provided with: an exterior body having two outer side walls; a plurality of battery cell groups that are arranged in parallel between the two outer side walls and that are each composed of a plurality of laminated battery cells; and holding mechanisms that are arranged between the plurality of battery cell groups and that hold the plurality of respective battery cell groups in the exterior body by applying, to the plurality of battery cell groups, a pressing force in a direction in which the battery cell groups are separated from each other and are pressed towards the two opposite outer side walls.

Battery device and method for manufacturing battery device

As a technology for an observation device and an inspection device, a technology capable of reducing a work effort related to generation of a recipe including alignment information is provided. An observation deviceincludes an observation unitthat obtains an image for observing a sampleon a stage. A computer systemof the observation deviceacquires the image from the observation unit, specifies a period of a pattern-formed unit region repeatedly formed on a surface of the samplefrom the image, and generates a recipe including observation or inspection alignment positions of the sampleusing the specified period.

Computer system of observation device and processing method

A semiconductor inspection devicehaving a first measurement mode and a second measurement mode includes: an electron optical system configured to irradiate a sample with an electron beam; an optical system configured to irradiate the sample with light; an electron detector configured to detect a signal electron; a photodetectorconfigured to detect signal light; a control unitconfigured to control the electron optical system and the optical system such that an electron beam and light are emitted under a first irradiation condition in the first measurement mode, and to control the electron optical system and the optical system such that an electron beam and light are emitted under a second irradiation condition in the second measurement mode; and a computer configured to process a detection signal from the electron detector or the photodetector.

Semiconductor inspection device and method for inspecting semiconductor sample

A control device controls a contact probe in synchronization with a pulse-controlled light having a predetermined wavelength, a measurement instrument measures a characteristic of a sample to be inspected or an analysis sample, and a circuit constant or a defect structure of the sample to be inspected is estimated based on a circuit model created by an electric characteristic analysis device configured to generate the circuit model based on a value measured by the measurement instrument and a detection signal of secondary electrons detected by the charged particle beam device.

Inspection method

A battery device is provided with: an exterior body having two outer side walls; at least one battery cell group that is arranged between the two outer side walls of the exterior body and that is composed of a plurality of laminated battery cells; a first temperature-adjusting medium flow path that is provided in at least one of the two outer side walls of the exterior body and in which a temperature-adjusting medium capable of exchanging heat with the battery cells via the outer side wall flows; and a holding mechanism that brings the battery cell group into contact with the outer side wall so that heat can be exchanged and that holds the battery cell group in the exterior body by applying, to the battery cell group in the exterior body, a pressing force in a direction towards the outer side wall having the first temperature-adjusting medium flow path.

Battery device including battery cell group configured by a plurality of laminated battery cells in outer packaging and method for manufacturing the battery device

There is provided a charged particle beam apparatus that can reduce the processing time. A charged particle beam apparatus includes: an excitation control unit that controls a focal position by changing a control value of excitation of an electronic lens; an electrostatic field control unit that controls the focal position by changing a control value of an electrostatic field; a focal position height estimation unit that estimates a height of the focal position from the control value of the excitation of the electronic lens; and a control unit that controls the excitation control unit and the electrostatic field control unit. The control unit compares the height of the focal position estimated by the focal position height estimation unit with a height of a sample surface of a sample to be observed, and according to a result of comparison, determines whether it is necessary to change the control value of the excitation of the electronic lens before observing the sample.

Provided is a vehicle battery device in which components are reduced, a compact configuration can be achieved, and connection with the outside can be easily performed. A vehicle battery device includes: a battery cell mounting part accommodating a battery cell group constituted by a plurality of laminated battery cells; and an interface box integrating connection functions between the battery cell mounting part and the outside, wherein the battery cell mounting part is connected to at least one of two opposing side surfaces in an outer surface of the interface box, and has an end plate on an end surface opposite an end surface connected to the interface box; and the battery cell group of the battery cell mounting part is compressed and sandwiched between the side surface of the interface box and the end plate in a lamination direction of the battery cells.

Vehicle battery device

A charged particle beam device according to the present invention changes a signal amount of emitted charged particles by irradiating the sample with light due to irradiation under a plurality of light irradiation conditions, and determines at least any one of a material of the sample or a shape of the sample according to the changed signal amount.

Charged particle beam device

A vehicle battery device includes: a battery cell mounting part accommodating a battery cell group constituted by a plurality of laminated battery cells and having a temperature control solution passage along a lamination direction of the battery cells; and an interface box, wherein the battery cell mounting part is connected to at least one of two side surfaces of the interface box; the interface box has, on any outer surface other than the side surface connected with the battery cell mounting part, a power interface part transmitting and receiving electricity and a temperature control solution interface part transmitting and receiving a temperature control solution; the battery cell group is electrically connected to the power interface part; and the temperature control solution passage is connected to the temperature control solution interface part so as to be capable of circulating the temperature control solution.

Provided is a vehicle battery device in which number of battery cells can be easily increased, a large number of battery cells can be arranged at high density, and connection with the outside can also be easily performed. The vehicle battery device includes: a battery cell mounting part accommodating a battery cell group constituted by a plurality of laminated battery cells; and an interface box integrating connection functions between the battery cell mounting part and the outside, wherein the battery cell mounting part is connected to at least one of two opposing side surfaces in an outer surface of the interface box; and the interface box has, on any outer surface other than the side surface connected with the battery cell mounting part, a connection part capable of connecting the interface boxes to each other.

The objective of the present invention is to simultaneously achieve image observations at a high resolution using an electron microscope, and X-ray analysis at a high energy-resolution using a microcalorimeter. An X-ray detector is disposed at a position where the intensity of the magnetic field from an objective lens is weaker than the critical magnetic field of a material used in a thermal insulation shield for a superconducting transition-edge sensor or a microcalorimeter. In addition, an optical system for transmitting X-rays to the detector is inserted between a sample and the detector. Alternatively, a magnetic field shield for shielding the X-ray detector is used.

Electron microscope

Growing community of inventors

Tokyo, Japan

Satoshi Takada