Taiyo Yuden Co., Ltd.

Satoshi Orito

Shinji Taniguchi

Taisei Irieda

Tatsuya Aoki

Mitsuhiro Habuta

An acoustic wave device includes: a substrate; a lower electrode, an air gap being interposed between the lower electrode and the substrate; a piezoelectric film located on the lower electrode; and an upper electrode located on the piezoelectric film such that a resonance region where at least a part of the piezoelectric film is interposed between the upper electrode and the lower electrode is formed and the resonance region overlaps with the air gap in plan view, wherein a surface facing the substrate across the air gap of the lower electrode in a center region of the resonance region is positioned lower than a surface closer to the piezoelectric film of the substrate in an outside of the air gap in plan view.

Growing community of inventors

Tokyo, Japan

Satoshi Orito