Boc Edwards Technologies Limited

Edwards Japan Limited

Boc Edwards Japan Limited

Societe De Mecanique Magnetique

Satoshi Okudera

Yoshiyuki Sakaguchi

Yasushi Maejima

Takashi Kabasawa

Tooru Miwata

Hirotaka Namiki

Shinji Kawanishi

Ulrich Schroder

Eduardo Carrasco

Yutaka Inayoshi

Masayoshi Takamine

Benoit Henry

Togru Miwata

Kenji Kabata

Yoshiyuki Aguchi

The present invention provides a splinter shield for a vacuum pump, capable of reducing costs of the splinter shield by obtaining a single sheet of splinter shield having a required strength, in which fastening strength to a fixing groove is enhanced to prevent the splinter shield from bending toward the inside of a pump and coming into contact with equipment inside the pump when air rushes into the pump through an inlet port and to prevent the splinter shield from falling. Furthermore, attachment and removal of the splinter shield with respect to the inlet port are facilitated. The present invention is a splinter shield for a vacuum pump in which a rim formed in a circumferential edge portion of the splinter shield is inserted into a fixing groove that is provided in a concave manner in an inner circumferential portion of an inlet port, and the splinter shield is provided in a tensioned manner to the inlet port by pushing a retaining ring into the fixing groove, wherein locking parts that are locked into the retaining ring at a plurality of sections in the rim are provided in a standing manner at substantially right angles to the rim.

Splinter shield for vacuum pump, and vacuum pump with the splinter shield

To provide a stator member that facilitates thermal radiation from a surface thereof and thermal conduction to an adjacent member, and a vacuum pump that contains the stator member. For the purpose of enhancing heat dissipation of a rotor portion, surface treatment removal processing is performed on a predetermined section of a thread groove spacer in order to efficiently release heat of the thread groove spacer toward a base and a stator blade spacer. More specifically, the surface treatment removal processing removes the surface treatment of the base and a section where the stator blade spacer comes into contact with the thread groove spacer. This surface treatment removal processing is executed simultaneously with finishing processing.

Stator member and vacuum pump

A vacuum pump including a pump main unit and a control unit is disclosed. The control unit includes a substrate having electronic elements mounted thereon and terminal pins soldered to the substrate at a first end edge of the substrate. The substrate is mounted to a plate via an attachment near a second end edge opposing the first end edge and the plate is mounted to the pump main unit. The terminal pins extend through the plate. Upon linear thermal expansion of the terminal pins, by reason of the location of the terminal pins near the first end edge and the attachment near the second end edge, stresses in the soldered pin connections are reduced. A molding material having a Shore hardness of less than 50, is molded around the electronic elements on the substrate in one embodiment.

Reducing the influence of thermal expansion of connector pins on a substrate in a vacuum pump

A damper is configured for a vacuum pump that evacuates a vacuum system via gas transfer by a gas transfer mechanism in the vacuum pump by the rotating action of a rotating body in the vacuum pump. The damper restrains the propagation of vibrations produced in the vacuum pump to the vacuum system during an evacuation operation. The damper comprises a vibration absorbing device that is positionable between the vacuum pump and the vacuum system during an evacuation operation and that has a damping characteristic in a frequency band that coincides substantially with a rotation frequency of the rotating body of the vacuum pump.

Damper and vacuum pump

A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral with the stator. A cooling water pipe is buried in a wall of the stator column near the electrical equipment section. One end of the cooling water pipe branches into a plurality of water inlet ports and the other end branches into a plurality of water outlet ports. One pair of water inlet and outlet ports opens to the outside of the vacuum pump at a side surface of the stator column and another pair of water inlet and outlet ports opens to the outside at the underside of the stator column.

Vacuum pump

A vacuum pump casing has an opening that is covered and sealed by a cover member. The cover member is formed of molded resin with connector pins molded therein. The connector pins project outwardly from opposite sides of the cover member and are connected outside the pump casing to cables leading to a control device and connected inside the pump casing to cables leading to components within the pump casing.

Terminal structure and vacuum pump

A terminal structure has a first connector arranged at a first member, such as a vacuum pump, and a plurality of connector pins. A second member, such as a control device, is movable toward and away from the first member, and a second member side bolt is arranged at the second member. A second connector has a plurality of connecting pins and a flange portion through which the bolt passes and which is movable with respect to the bolt while the second connector is being fit-engaged with the first connector to electrically connect the connector pins of the first and second connectors. An elastic member elastically retains the flange portion and produces an elastic force that resists a push-back displacement which acts on the second connector at the moment of fit-engagement with the first connector in either a direction parallel to the bolt or in a direction inclined at an angle from the parallel direction. The push-back displacement of the flange portion of the second connector is resisted by the elastic force generated by deformation of the elastic member so that excessive force is not applied to the two connectors even if they are obliquely fit-engaged with one another.

A molecular pump has a casing having a gas inlet port and a gas discharge port, a stator disposed within the casing, a shaft disposed in the casing concentrically with the stator, a bearing rotatably supporting the shaft for undergoing rotation relative to the stator in a preselected direction of rotation, a rotor mounted on the shaft for rotation therewith in the preselected direction of rotation, and a motor for rotationally driving the shaft. A flange is connected to the casing at the gas inlet port. The flange has at least one mounting hole for receiving a fastener, a first elongated through-hole disposed in communication with the mounting hole, and a second elongated through-hole spaced apart from the first elongated through-hole in a direction toward a direction of rotation opposite to the preselected direction of rotation to define between the first and second elongated through-holes a deformable thin-wall portion for undergoing deformation due to a shock resulting from a torque acting on the casing in the preselected direction of rotation.

Molecular pump equipped with flange having buffering portion

A vacuum pump has a pump case having a gas suction port at an upper surface thereof, a rotor shaft mounted in the pump case for undergoing rotation, and a rotor connected to the rotor shaft for rotation therewith. The rotor has inner and outer circumferential surfaces coated with a corrosion-resistant film treated by nonelectrolytic plating. Rotor blades are disposed in the pump case and are integrally connected to the outer circumferential surface of the rotor. Stator blades are integrally connected to the pump case so that the rotor blades and the stator blades are alternately positioned and arranged. A balancing body is disposed on the inner circumferential surface of the rotor for balancing the rotor during rotation thereof.

A vacuum pump has a rotor mounted to undergo rotation about a rotational axis. A cylindrical base member surrounds a lower outer periphery of the rotor. A cylindrical pump case surrounds an upper outer periphery of the rotor. The base member has an inner periphery, an outer periphery, and a groove formed between the inner and outer peripheries thereof. The pump case is connected to the base member so that a portion of the outer periphery of the base member confronts a portion of the inner periphery of the pump case. A thread groove is formed in the inner periphery of the base member.

A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

Turbo-molecular pump

A vacuum pump adopts a positioning structure in which stator blades and spacers are arranged in the radial direction of a pump case by the contact between the outer peripheries portion of the stator blades and the inner periphery portion of the pump case and the contact between the outer periphery portions of the spacers and the inner periphery portion of the pump case. Accordingly, the spacer interposed between the upper and lower stator blades can have a simplified shape that serves a function of only setting the spacing between the stator blades to a prescribed length, thus decreasing the number of steps and costs of processing the spacer, and accordingly reducing the costs of the entire vacuum pump.

A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber. Bolts extend through respective ones of the bolt insertion holes for removably connecting the flange of the pump case to the underside of the chamber, and buffer members are disposed in respective ones of the bolt insertion holes and surround at least a portion of the corresponding bolt in the region between the upper and lower surfaces of the flange.

The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.

Growing community of inventors

Narashino, Japan

Satoshi Okudera