Panasonic Corporation

Matsushita Electric Industrial Co., Ltd.

Panasonic Intellectual Property Management Co., Ltd.

Satoshi Ohuchi

Hiroyuki Aizawa

Hideo Ohkoshi

Takami Ishida

Jiro Terada

Ichirou Satou

Yohei Ashimori

Toshiyuki Nozoe

Takeshi Yamamoto

Takeshi Uemura

Yasunobu Tsukio

Shigehiro Yoshiuchi

Hiroyuki Nakamura

Keisuke Kuroda

Isao Hattori

Shusaku Kawasaki

Kensaku Yamamoto

Masahiro Yasumi

Katsuya Morinaka

Shoji Okamoto

Takashi Imanaka

Michihiko Hayashi

Tsuyoshi Fujii

Yuuki Nakamura

Sigehiro Yosiuti

Daisuke Nakamura

Noriyuki Jitousho

Takeshi c/o Matsushita Electric Ind Co Ltd Yamamoto

An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

Angular velocity sensor

An inertial force sensor has a first sensor element, a second sensor element, a first signal processor, a second signal processor, and a power controller. The first sensor element converts a first inertial force to an electric signal, and the second sensor element converts a second inertial force to an electric signal. The first signal processor is connected to the first sensor element, and outputs a first inertial force value. The second signal processor is connected to the second sensor element, and outputs a second inertial force value. The power controller is connected to the first signal processor and the second signal processor, and changes power supplied to the second signal processor based on the first inertial force value.

Inertial force sensor

An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (), that is, an inertial force sensor includes ceramic substrate (), lower lid () adhering to ceramic substrate () with adhesives (and) (first adhesives), and sensor element () adhering to lower lid () with adhesives (and) (second adhesives). The elastic moduli of adhesives (and) are smaller than those of adhesives (and).

Angular velocity sensor for suppressing fluctuation of detection sensitivity

A sensor includes a circuit board, a wiring connection layer, a sensor element, and a conductive post. The circuit board has a first electrode. The wiring connection layer has second and third electrodes. The second electrode is connected to the first electrode. The sensor element has a fourth electrode. The conductive post connects the third electrode electrically with the fourth electrode. This sensor can be driven efficiently.

Sensor

An inertial force sensor is composed of a plurality of arms and an oscillator having a base for linking the arms, in which a trimming slit is formed on a part of the arm except for a ridge portion, thus controlling damage to a tuning fork arm to be caused by the trimming.

An angular velocity sensor comprising a fixed part, a weight coupled with the fixed part via a flexible part having a bending part, a first electrode disposed outside the bending part, and a second electrode disposed inside the bending part, in which the first electrode and the second electrode have an upper electrode and a lower electrode interposed by a piezoelectric layer, respectively, and the width of the first electrode is smaller than the width of the second electrode, and the difference of the amounts of electric charges generated at the first electrode and the second electrode can be suppressed thereby improving the accuracy of detection.

A sensor includes detecting element () with an acceleration sensor, which is formed of weight () coupled to rigid section () via flexible section (), substrate () confronting weight (), and an electrode section including opposed electrodes () placed on respective opposed faces of weight () and substrate (). This structure prevents weight () from moving along Z-axis, so that a detection accuracy of acceleration occurring along X-axis or Y-axis can be improved.

Inertial force sensor includes detecting element that detects inertial force. Detecting element includes: two first orthogonal arms each having first arm and second arm that are connected to each other in a substantially orthogonal direction; support portion that supports two first arms; fixing arms; and weights. Second arms include: bent portions; facing portions that are bent at bent portions so as to face second arms; driving electrodes that are formed in two facing portions facing each other, and drive and vibrate facing portions; and detection electrodes that are formed in the other two facing portions facing each other, and detect the distortion of facing portions. According to this structure, it is possible to achieve small inertial force sensor capable of detecting a plurality of different inertial forces and inertial forces acting on a plurality of detection axes.

Inertia force sensor

An electronic component is disclosed, and this component includes an element with an electrode section which is formed of upper electrode (), lower electrode (), piezoelectric unit () placed between upper electrode () and lower electrode (), and adhesive layer () layered between upper electrode () and piezoelectric unit (). Piezoelectric unit () includes piezoelectric layer () made of piezoelectric material containing lead, and adhesive layer () includes a tungsten layer made of tungsten-based material. Piezoelectric layer () and the tungsten layer are layered together. The structure discussed above allows preventing a piezoelectric constant from lowering and a base-point voltage from varying. The lowering and the varying have been caused by a temperature-rise.

Electronic component and method for manufacturing the same

Growing community of inventors

Hyogo, Japan

Satoshi Ohuchi