Horiba, Ltd.

Satoshi Ohashi

Yoshiaki Nakata

Kentaro Nishikata

Koichi Matsumoto

Akira Onoguchi

Kenichi Obori

Yutaka Saijo

Takashi Komatsubara

Shigeru Kakinuma

Junichi Aoyama

Shogo Awata

The present invention is one that removes noise of a voltage signal to be inputted to a pulse processor, as well as improves radiation energy resolution, and includes: a radiation detectorthat outputs charge generated by incidence of radiation; a preamplifierthat converts the generated charge into an analog signal; an A/D conversion partthat converts the analog signal from the preamplifierinto a digital signal; a denoising filterthat removes the noise from the digital signal from the A/D conversion part; a waveform shaping partthat generates a pulse signal from a digital signal having passed through the denoising filter; a pulse height detection partthat detects peak values of the pulse signal from the waveform shaping part; and a count partthat, on a pulse height basis, counts the peak values obtained by the pulse height detection part, in which the denoising filteris one that removes the noise by taking the weighted moving average of values of the digital signal with use of a weighting factor depending on the difference from a predetermined reference value.

Radiation detection system and signal processor for radiation detection

Linear ribs are formed radially with a center at a through-hole on one face of an X-ray transmissive film (radiolucent film) in an X-ray transmissive window (radiolucent window) to be used for an X-ray detector (radiation detector). The X-ray transmissive window faces a sample. A beam for irradiation to the sample passes through the through-hole, and X-rays (radiation) are radially emitted on a line extending through the through-hole and enter the X-ray transmissive window. Since the linear ribs are formed radially with the center at the through-hole, even X-rays entering at shallow angles with respect to the X-ray transmissive window are transmitted through the X-ray transmissive window at a probability equivalent to X-rays entering at deep angles. More X-rays are transmitted through the X-ray transmissive window, and thus the X-ray detector can detect X-rays with high efficiency.

Radiolucent window, radiation detector and radiation detection apparatus

The X-ray analyzer generates a spectrum of X-rays obtained from an area on a sample where the intensity of X-rays whose energy is not included in an already set-up ROI is high and then, from the generated spectrum, identifies a new element for which an ROI is not set up. Further, the X-ray analyzer sets an ROI corresponding to the identified element and then obtains element distribution. The X-ray analyzer repeats generation of an X-ray spectrum, identification of an element, setting of an ROI, and obtaining element distribution. This avoids unintended omission of setting of an ROI and hence permits as-much-as-possible coverage of the elements in the sample. Further, distribution of a trace element is allowed to be obtained rapidly.

X-ray analyzer

The X-ray analyzer repeats scanning of a sample by an electron beam from an electron gun (beam source), detects a characteristic X-ray from the sample by an X-ray detector, generates an element distribution image of the sample by a signal processor every scanning, and stores a plurality of element distribution images in a sequential order. Temporal changes of the element distribution image of the sample are obtained. Moreover, by moving a stage by a moving unit concurrently with the scanning, an element distribution image of the sample where the scanning position is varied is obtained. By generating the element distribution image while varying the scanning position, positioning of the range where the element distribution image is to be obtained on the sample can be quickly performed based on the element distribution image itself.

Provided is an electrostatic lens for charged particle radiation with a lens performance relatively comparable to that of a magnetic type lens. A plurality of electrodes arranged on the incident side of charged particles form a first electric field area, wherein orbit radii of the charged particles are reduced without exceeding, on the way, the initial orbit radii that are orbit radii at the incident time, and a second electric field area, wherein force in the direction advancing in parallel with a central axis is applied to the charged particles that have passed through the first electric field area. A plurality of electrodes arranged on the projection side form a third electric field area, wherein the orbit radii of the charged particles do not exceed the initial orbit radii on the way and are curved to intersect with a central axis at angles larger than orbit angles defined with respect to the central axis of when the charged particles are projected from the second electric field area.

Electrostatic lens for charged particle radiation

An object of this invention is to make it easy to adjust a position of the energy beam to irradiate and a position of a focal point of a light collecting mirror part, and to prevent displacement of the light collecting part due to vibration with a simple arrangement. A sample measuring device in accordance with this invention is to measure light generated from a sample W by irradiating electron beams EB on the sample W, and comprises a electron optical column partthat converges the electron beams EB, and a light collecting mirror partthat is arranged between the electron optical column partand the sample W and that has an energy beam pathto pass the electron beams EB converged by the electron optical column partand to irradiate the electron beams EB on the sample W and a mirror facewhose focal point F is set on an axis of the energy beam pathand that collects the light L generated from the sample W by means of the mirror face, wherein the light collecting mirror partis supported by the electron optical column partso that the axis of the electron beams EB coincides with the focal point F.

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Kyoto, Japan

Satoshi Ohashi