Disco Corporation

Mitsubishi Electric Corporation

Satoshi Odaira

Kazuma Sekiya

Makoto Higashino

Munehiro Shinada

The control device in a linear motor system calculates a current command value for the stator based on a first speed integrated value obtained by integrating a speed deviation between a speed command for the mover and an actual speed of the mover, and performs first digital filter computation on the current command value. The control device calculates a current command value for the stator based on a second speed integrated value obtained by integrating a speed deviation between a speed command for the mover and the mover's actual speed, and performs second digital filter computation on the current command value. The current command calculating unit calculates a second speed integrated value based on the first speed integrated value used by the control device, and performs the second digital filter computation using a value of the first digital filter computation of the control device.

Linear motor system

A processing apparatus includes a cassette rest unit from which a wafer is fed by an unloading unit and a feed unit to a plurality of processing units, in which the layout of the units can be changed. The processing unit also has a control unit including a display panel for displaying an input screen for entering operating conditions for the units and a memory unit configured to store at least the operating conditions for the units. The memory unit includes an image memory for storing respective plan-view images of the units, and the display panel displays an overall apparatus map representing a combination of the plan-view images of the units as a layout of the processing apparatus in its entirety. The layout of the plan-view images of the units in the overall apparatus map can be changed.

Processing apparatus

An information exchanging method using a two-dimensional code and a two-dimensional code reader. An original sheet is prepared by writing a first two-dimensional code and a second two-dimensional code. The first two-dimensional code is readable by the code reader, whereas the second two-dimensional code is unreadable by the code reader. A monochrome copy sheet is prepared by monochromatically copying the original sheet, so that the monochrome copy sheet includes a third two-dimensional code as a monochrome copy of the first two-dimensional code and a fourth two-dimensional code as a monochrome copy of the second two-dimensional code. Accordingly, the third two-dimensional code is unreadable by the code reader, whereas the fourth two-dimensional code is readable by the code reader. Information exchange is performed by using the original sheet and the monochrome copy sheet.

Growing community of inventors

Tokyo, Japan

Satoshi Odaira