Skyworks Solutions, Inc.

Skyworks Filter Solutions Japan Co., Ltd.

Satoshi Niwa

Hiroyuki Nakamura

Yoshiaki Ando

An acoustic resonator that prevents a radio frequency (RF) signal from being coupled to a cap substrate. An electronic device includes a first substrate (device substrate) of piezoelectric material having a top surface on which an electronic circuit including a film bulk acoustic resonator is formed, a second substrate (cap substrate) of low-resistivity material, a bottom surface of which is disposed opposing the top surface of the first substrate, and a side wall disposed between the top surface of the first substrate and the bottom surface of the second substrate. The side wall defines a cavity together with the top surface of the first substrate and the bottom surface of the second substrate, the cavity internally including the electronic circuit. A thin film of high-resistivity material is formed on at least a portion of the bottom surface of the second substrate to prevent an RF signal emitted from the electronic circuit from being coupled to the second substrate.

Acoustic resonators with reduced loss characteristics and methods of manufacturing same

Aspects and examples provide electronic elements and filter devices configured to prevent deterioration of the propagation characteristics caused by input and output signals being electromagnetically coupled to an electric conductor side wall. In one example an electronic filter includes an element substrate having a top surface, a bottom surface, a side surface, and piezoelectric body. A circuit including a plurality of SAW resonators is formed on the top surface of the element substrate. The electronic filter further includes a sealing substrate having a top surface and a bottom surface, and a side wall including an electric conductor and formed to define a cavity between the top surface of the element substrate and the bottom surface of the sealing substrate, the side wall enclosing a periphery of the circuit and being connected to a ground potential of the circuit.

Saw-based electronic elements and filter devices

Aspects and examples provide improvement in the attenuation level near the passband within the stopband of the bandpass-type filter using a ladder-type circuit formed by a BAW resonator. In one example the filter includes a ladder-type circuit formed by a bulk acoustic wave (BAW) resonator, and a loop circuit connected between two distinct points on a signal path extending from an input to an output of the ladder-type circuit for phase-cancellation of signals at the two distinct points. The two distinct points may be the input and the output of the ladder-type circuit. The loop circuit may include a SAW resonator or a BAW resonator. The BAW resonator may be a film bulk acoustic resonator (FBAR) or solidly mounted resonator (SMR).

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Taito-ku, Japan

Satoshi Niwa