Kabushiki Kaisha Nihon Micronics

Satoshi Narita

Kenji Sasaki

Kazuhito Hamada

Takashi Akiniwa

Nobuyuki Yamaguchi

Shou Harako

Yoshiei Hasegawa

Hisao Narita

Jukiya Fukushi

Yukihiro Hirai

Norie Yamaguchi

Yoko Ichinohe

Tadashi Sugiyama

Takahiko Tandai

Jun Shirato

Electric contact

An inspection apparatus makes an inspection of electrical characteristics of an object to be inspected using a contactor brought into electrical contact with an electrode of the object to be inspected, the inspection apparatus including: a position adjusting unit including the contactor, a position adjusting section that adjusts a tip position of the contactor, and a load detecting section that detects a value of contact load between the contactor and the electrode; a position deriving section that derives an initial position of the contactor in a specific direction based on a relationship between an amount of contact displacement of the contactor in the specific direction and the value of contact load between the contactor and the electrode; and a movement performing section that moves the tip position of the contactor based on the initial position in the specific direction derived by the position deriving section.

Inspection apparatus having a contactor for inspecting electrical characteristics of an object, a contactor tip position adjusting unit, and a position adjusting method therefor

It is possible to make the free length of a contactor uniform even when the contactor is joined to a position that deviates from a joint position in a high-frequency conducting path and make contact with an electrode with stability, which improves measurement quality. A probe unit according to the present disclosure includes: a coaxial connector that is attached to a main body and gives and receives an electrical signal to and from a tester via a coaxial cable; a high-frequency conducting path that is connected to the coaxial connector and transmits an electrical signal; a plurality of contactors, each having a tip portion that makes electrical contact with an electrode of an object to be inspected and giving and receiving an electrical signal to and from the high-frequency conducting path; and a pedestal that is interposed between the contactor and the high-frequency conducting path, and the pedestal is provided in each contactor such that a free length of the contactor is a predetermined length.

Probe unit with a free length cantilever contactor and pedestal

Quality of connection portions between respective probes and respective wires in a probe assembly is improved. Also, time required for work for connection between the probes and the wires is shortened. Further, improper connection between the probes and the wires is eliminated. A probe assembly includes an electric insulating substrate, a plurality of probes supported on one surface of the substrate, a plurality of through holes provided in the substrate to respectively correspond to the plurality of probes and filled with a conductive material attached to the respective probes, and a plurality of conductive membranes formed on the other surface of the substrate and respectively attached to the conductive material in the plurality of through holes.

Probe assembly, probe card including the same, and methods for manufacturing these

An electrical connecting apparatuscomprises: a base plateprovided on its undersidewith a plurality of pedestalsat intervals in a front-back direction; and multiple contact groups, each of which has a first contactand a second contactEach first contactincludes a needle body portionhaving a rear end portionsupported on the pedestaland a front end portionwhich is a free end and extending leftward. Each second contactincludes a needle body portionhaving a rear end portionsupported on the pedestaland a front end portionwhich is a free end and extending rightward. When the first contactis broken, the second contactscan be used.

Electrical connecting apparatus and contacts used therefor

An embodiment of the invention provides a method for manufacturing a probe sheet in which a probe tip can be arranged at a predetermined accurate position without the need for troublesome positional adjustment operations of the probe tip in coupling operations of each contactor and a probe sheet main body. It is a method for manufacturing a probe sheet comprising a probe sheet main body having conductive paths and a plurality of contactors formed to be protruded from one surface of the probe sheet main body and connected to the conductive paths. The manufacturing method comprises the steps of forming a plurality of the contactors on a base table by sequentially depositing on the base table metal materials for a plurality of contactors from their respective probe tips toward base portions with use of a photolithographic technique, forming on the base table the probe sheet main body to be coupled with the base portion of each contactor held on the base table, and separating the contactors from the base table integrally with the probe sheet main body.

Method for manufacturing probe sheet

An embodiment of an electrical connecting apparatus comprises a support board having an upper surface and a lower surface, a block having an attachment surface directing downward and attached to the support board in a state where at least the attachment surface is located below the support board, a flexible circuit board having a contactor area in which a plurality of contactors are arranged and an outside area around the contactor area and attached at part of the outside area to the lower surface of the support board in a state where at least the contactor area is opposed to the attachment surface of the block, and a reference mark member having a lower end surface and a reference mark for positioning provided on the lower end surface and attached to the block in a state where the lower end surface is exposed to the lower side of the circuit board. Accordingly, the measurement accuracy of the probe tip position is heightened.

Electrical connecting apparatus

The present invention provides an electrical connecting apparatus in which no strong stress acts on a coupling portion of an arm portion continuing into a base portion by a moment force acting on the arm portion. A probe sheet comprising a probe sheet main body and a plurality of probes formed to be protruded from one surface of the probe sheet main body is provided. For formation of the arm portion of the probe, a metal material for an arm main body portion continuing into a probe tip portion is deposited on a base table with an approximately uniform height dimension. Also, a metal material for a reinforcing portion constituting an arm portion together with the arm main body portion is deposited at an area on the arm main body portion distanced from the probe tip portion with an approximately uniform height dimension. Further, a metal material for forming a base portion that is connected to at least the reinforcing portion is deposited without covering a step consisting of one end of the reinforcing portion located on the probe tip portion side and the arm main body portion. Thus, the arm portion in which a height dimension at a coupling portion with the base portion is larger than that at another part except the coupling portion is formed.

Electrical connecting apparatus and method for manufacturing the same

An embodiment of a probe sheet enabling to restrict misalignment of the posture of each contactor accurately positioned on a probe sheet main body caused by deformation of the probe sheet main body is provided. The probe sheet comprises a probe sheet main body having a flexible insulating synthetic resin film and conductive paths buried in the synthetic resin film and a plurality of contactors formed to be protruded from a contactor area on one surface of the probe sheet main body and connected to the conductive paths. In the probe sheet main body is buried a plate-shaped member having higher rigidity than that of the synthetic resin film and restricting deformation of the contactor area.

Probe sheet and electrical connecting apparatus

The probe card includes a plurality of probes arranged on one surface side of a board. These probes belonging to any one of a first probe group including a plurality of probes contacting respective electrodes in a first electrode row of an electronic device, a second probe group including a plurality of probes contacting respective electrodes in a second electrode row of the electronic device, and a third and fourth probe groups respectively including a plurality of probes contacting respective electrodes in a middle electrode row of the electronic device alternately.

Electronic device probe card with improved probe grouping

The probe assembly has a plurality of probes, a probe base provided with the probes, and a plurality of guard members provided on the probe base. Each probe has an arm portion supported on the probe base at its one end and extending from a mounting surface of the probe base at a distance substantially along the mounting surface. At the other end of each arm portion is formed a tip projecting so as to project in a direction to be away from the mounting surface of the probe base. The guard member is supported on the probe base near at least one side of each arm portion. The guard surface is positioned in the vicinity of the height position of one surface and the opposite other surface of the arm portion opposing the mounting surface of the probe base.

Electrical probe assembly with guard members for the probes

An electrical connecting apparatus is used for electrical inspection of a device under test having electrodes each of which a recess is formed on a flat upside. The electrical connecting apparatus is provided with a plurality of probes, each probe including a base portion combined with a probe board, an elastically deformable arm portion extending above the electrodes of the device under test from the base portion along the probe board and at a distance therefrom, and a tip portion projecting from the arm portion in a direction to be away from the probe board. The front end of the tip portion of each probe can abut a flat surface area except the recess on the upside of the electrode in a state that no flexural deformation is caused in the arm portion. The electrical connecting apparatus is used so that, when an overdrive force toward the electrode acts on the probe to cause the arm portion a flexural deformation, the front end of the tip portion can move on the flat surface area without departing from the flat surface area.

Electrical connecting apparatus and method for use thereof

A probe card including a plurality of probe blocks can be easily put together substantially in a lattice-like form, and four chips adjoining around the intersection portion of imaginary boundary lines intersecting at right angle each other form a cross-like shape to be tested simultaneously. A plurality of probe blocks with the first and second probe group including a plurality of probes are set up on a base plate substantially in the lattice-like form by a probe set-up means. The needle points of the first and second probe groups are respectively located across the imaginary line so as to oppose to each other. A probe blocks located around the lattice intersection portion are fitted to the base plate such that the needle point parts of the probes located in the vicinity of the lattice intersection portion are positioned on the same side with respect to their needle rear part.

Growing community of inventors

Aomori, Japan

Satoshi Narita