Murata Manufacturing Co., Ltd.

Isolite Insulating Products Co., Ltd.

Satoshi Nakano

Junzo Fukuta

Yoshio Mizuno

Katsuhiko Naka

Yohei Fukino

A method of fabricating a multilayer ceramic substrate includes stacking one or a plurality of unfired ceramic greensheets on one or both sides of a previously fired ceramic substrate, thereby forming a stack, each unfired ceramic greensheet having a firing temperature substantially equal to or lower than a firing temperature of the previously fired ceramic substrate, stacking a restricting greensheet on the unfired ceramic greensheet composing an outermost layer of the stack, the restricting greensheet having a higher firing temperature than each unfired ceramic greensheet, firing the stack at the firing temperature of the unfired ceramic green sheets with or without pressure applied via the restricting greensheet while the stack is under restriction by the restricting greensheet, thereby integrating the stack, and eliminating remainders of the restricting greensheet after the firing step.

Method of fabricating multilayer ceramic substrate

In a ceramic setter plateof a plate-shaped sintered bodyof a non-oxide ceramic material formed by firing ceramic particlesof at least one selected from the group consisting of SiC, SiN, BN, AlN, MoSi, TiN and ZrB, the sintered bodyis composed of a porous bodyhaving interconnected poresand one or more cavitiesinside thereof in substantially the center in the thickness direction of thereof, at least one of the cavitieshas therein one or a plurality of branched parts, the cavitieshave opening partsat side parts of the sintered body. The ceramic setter plate has good gas permeability for firing a laminate of ceramic green sheets, for which the firing efficiency is good, and for which repeated use is possible.

Growing community of inventors

Ogaki, Japan

Satoshi Nakano