Canon Anelva Corporation

Satoshi Nakamura

Yukihito Tashiro

Kazuhito Watanabe

Naoyuki Nozawa

Daisuke Kobinata

Toshiaki Sasaki

A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder.

Growing community of inventors

Tama, Japan

Satoshi Nakamura