Asahi Denka Co., Ltd.

Adeka Engineering & Construction Co., Ltd

Satoshi Nakagawa

Akira Hioki

Akimasa Yajima

A fluid feeding apparatus capable of excluding the outer environmental influences in feeding a fluid susceptible to contamination, decomposition or denaturation on contact with the outer environment. The includes comprises at least one liquid source container, a cleaning and/or diluting liquid container, a waste liquid collection container, an inert gas feed pipe A, an inert gas feed pipe B, an evacuation pipe connecting to a vacuum source, and a fluid feed pipe for introducing the fluid to a process. The source container has two pipes. The first pipe has valves arranged therein at positions nearer to and farther from the source container, respectively. The second pipe has two valves arranged therein at positions nearer to and farther from the container, respectively. The path between the valvesandand the path between the valvesandare connected via a connecting pipe C having a valve

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Ibaraki, Japan

Satoshi Nakagawa