Seiko Epson Corporation

Satoshi Nagatoya

Nobuhiro Naito

Kosuke Wakamatsu

Michiya Nakamura

Takeshi Yasoshima

Kei Tadachi

Hiroyuki Tsuchiya

A valve unit includes a flow path member having an opening surface that has a flow path opening of a liquid flow path, a valve having a sealing surface configured to seal the flow path opening, and a sealing member disposed on one of a peripheral portion of the flow path opening in the opening surface and a portion of the sealing surface facing the peripheral portion. The sealing surface is configured to be moved forward and backward relative to the opening surface to open and close the flow path opening. The sealing member is configured to be in contact with the peripheral portion of the flow path opening and the sealing surface when the valve is closed. The sealing member includes a fluorinated polyether.

Valve unit, liquid ejecting head, liquid ejecting apparatus, method of producing valve unit, method of producing liquid ejecting head, and method of producing liquid ejecting apparatus

A liquid ejection apparatus includes a liquid ejection head including a nozzle forming face in which a plurality of nozzles through which liquid is ejected toward a droplet landing object are formed, and a protruding face protruding toward the droplet landing objet and disposed so as to surround the nozzle forming face, and a cap body including a bottom plate and a wall extending upwardly from the bottom plate and configured to seal the nozzle forming face within a sealing space formed by bringing a top portion of the wall into contact with the protruding face. Further, at minimum, a portion included in the wall and being brought into contact with the protruding portion is an elastic member including liquid repellency.

Liquid ejection apparatus with a nozzel cap partially made of an elastic member and production method for the liquid ejection apparatus

A silicon nozzle plate has excellent liquid resistance on an inner surface of a nozzle opening and a discharge surface. A plurality of the nozzle openings are disposed in a silicon substrate of the nozzle plate. A tantalum oxide film formed by atomic layer deposition is disposed on both surfaces of the silicon substrate and the inner surface of the nozzle opening.

Nozzle plate, liquid ejecting head, and liquid ejecting apparatus

A liquid ejecting head suppresses erosion of silicon substrates by liquid, and whereby suppresses leakage of liquid, discharging failure of liquid droplets, and peeling-off of laminated substrates. The liquid ejecting head includes at least a nozzle plate on which nozzle openings for discharging liquid are provided, and a flow path formation substrate on which a pressure generation chamber communicating with the nozzle openings is provided. The nozzle plate is formed with a silicon substrate. At least the flow path formation substrate and the nozzle plate are bonded to each other after providing a tantalum oxide film formed by atomic layer deposition on the entire surfaces including a bonded surface.

Liquid ejecting head and liquid ejecting apparatus

According to a liquid ejecting head, it is possible to suppress erosion of a vibrating plate by liquid, suppress generation of variation in a vibrating property, and realize a thin head. The liquid ejecting head includes a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided, an elastic film which is provided on one surface side of the flow path formation substrate and seals the pressure generation chamber, and a piezoelectric actuator which is a pressure generation unit which is provided on the elastic film to deform the elastic film. A tantalum oxide film which is formed by atomic layer deposition is provided at least on an inner wall of the pressure generation chamber.

Growing community of inventors

Azumino, Japan

Satoshi Nagatoya