Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi-high-technologies Corporation (2 from 2,874 patents)
2 patents:
1. 7288763 - Method of measurement accuracy improvement by control of pattern shrinkage
2. 7045782 - Method of measurement accuracy improvement by control of pattern shrinkage