Seiko Epson Corporation

Satoshi Denda

Jiro Kato

Koichi Morozumi

Ichiro Asaoka

Toshiki Hara

Hiroaki Tamura

Mitsuhiro Wada

Yoko Miyazawa

The liquid ejecting head includes a nozzle plate in which nozzle holes which are through holes are formed, and ejects liquid from the nozzle holes. The nozzle hole has a first nozzle portion which is opened to an ejection surface to which liquid is ejected from nozzles of the nozzle plate, and a second nozzle portion which communicates with the first nozzle portion, and is opened to a surface opposite to the ejection surface of the nozzle plate, and of which the opening diameter is larger than the opening diameter in the ejection surface of the first nozzle portion. The first nozzle portion is covered with a liquid repellent film which has higher liquid repellency than a base material of the nozzle plate and an inner wall of the second nozzle portion is provided with a region which has lower liquid repellency than the liquid repellent film.

Liquid ejecting head and liquid ejecting apparatus

A piezoelectric element includes a first conductive layer, a second conductive layer disposed to face the first conductive layer, and a piezoelectric layer disposed between the first conductive layer and the second conductive layer and composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer includes a lead concentration gradient region in which the lead concentration increases from the first conductive layer side to the second conductive layer side. The lead concentration gradient region is disposed on the first conductive layer side of the piezoelectric layer.

Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element includes a first conductive layer, a second conductive layer facing the first conductive layer, and a piezoelectric layer between the first and second conductive layers, composed of a compound oxide containing at least lead, zirconium, titanium, and oxygen. The piezoelectric layer includes a first crystal layer on the first conductive layer side of the piezoelectric layer and a second crystal layer continued from the first crystal layer, nearer to the second conductive layer side than the first crystal layer. In the piezoelectric layer, the lead concentration in the first conductive layer side of the first crystal layer is lower than that in the second conductive layer side of the second crystal layer. In the piezoelectric layer, the oxygen concentration in the first conductive layer side of the first crystal layer is higher than that in the second conductive layer side of the second crystal layer.

Piezoelectric element, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element comprising a first electrode, a piezoelectric layer which contains lead, zirconium, and titanium, and which is formed above the first electrode, and a second electrode formed above the piezoelectric layer. A groove which exists between grains in the second electrode side surface of the piezoelectric layer, satisfies 0&#x2266;d/&#x3c1;&#x2266;0.900 (where d: depth of groove, w: width of groove, &#x3c1;: radius of curvature (d+w/4)/2d).

A liquid-ejecting head includes a pressure-generating chamber communicatively connected to a nozzle opening and also includes a piezoelectric transducer including a first electrode, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The first electrode contains platinum and titanium oxide with a rutile content of 76.5 to 100 mole percent.

Liquid-ejecting head, liquid-ejecting apparatus, and piezoelectric transducer

A piezoelectric element comprising a first electrode, a piezoelectric layer which is composed of a metal oxide containing lead, zirconium and titanium and which formed above the first electrode, and a second electrode formed above the piezoelectric layer. The piezoelectric layer has negatively charged Pb&#x2014;O complex defects and positively charged Pb&#x2014;O complex defects, the concentration of the negatively charged Pb&#x2014;O complex defects being higher than the concentration of the positively charged Pb&#x2014;O complex defects.

A liquid ejecting head including a pressure generating chamber that communicates with a nozzle opening that ejects liquid and a piezoelectric element that generates a pressure change in the pressure generating chamber. The piezoelectric element includes a first electrode, a piezoelectric body layer that is formed on the first electrode which includes a grain-shaped region, and a second electrode that is formed on a side of the piezoelectric body layer that is opposite to the first electrode.

Liquid ejecting head, liquid ejecting apparatus and piezoelectric element

A liquid ejecting head includes a pressure generating chamber that communicates with a nozzle opening and a piezoelectric element that includes: a first electrode; a piezoelectric body layer that is formed on the first electrode and which has a perovskite structure with a general formula of ABO, and a second electrode that is formed the piezoelectric body layer. There is lead in a B site of the piezoelectric body layer, and the peak position of A(3LO) for a Raman shift of the piezoelectric body layer that is acquired by Raman scattering is 710 cmto 712 cm.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric actuator

A liquid ejecting head includes a pressure generating chamber that is communicated with a nozzle opening and a piezoelectric element includes a first electrode formed above the pressure generating chamber, a piezoelectric layer formed above the first electrode, and a second electrode formed above the piezoelectric layer. In addition, an amorphous layer including an amorphous material is formed on a surface of the piezoelectric layer at the second electrode side.

A liquid ejecting head includes a pressure generating chamber communicating with a nozzle opening, and a piezoelectric element generating a pressure change in the pressure generating chamber. In this liquid ejecting head, the piezoelectric element includes a first electrode, a piezoelectric layer provided above the first electrode, and a second electrode provided above the piezoelectric layer at a side opposite to the first electrode. The first electrode has a diffusion-preventing layer containing iridium oxide as a primary component, and the diffusion-preventing layer has stress relieving holes that pass through in the thickness direction thereof and that is filled with a material other than iridium oxide.

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Suwa, Japan

Satoshi Denda