Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Precision Co., Ltd.

Mitsubishi Denki Kabushiki

Satoshi Arimoto

Hiroaki Morikawa

Hideo Naomoto

Yoshinori Matsuno

Yoichiro Nishimoto

Yoshitatsu Kawama

Mikio Deguchi

Keisuke Namba

Hajime Sasaki

Takashi Ishihara

Toshitaka Aoyagi

Hisao Kumabe

Satoshi Hamamoto

Takashi Nishimura

Norio Hayafuji

Takashi Motoda

Etsuji Omura

Naohito Yoshida

Shigeru Mitsui

Akihiro Takami

Toshio Murotani

Kenichi Kajiwara

Yukio Shinoda

In preparing a solar cell, minute projections and recesses are uniformly formed in a surface of a single crystal silicon substrate or a polycrystal silicon substrate by dipping in an etching liquid composed of a mixed acid which is composed mainly of a hydrofluoride acid, a nitric acid and a phosphoric acid in addition to a surface active agent. A solar cell having a substrate in which spherical projections and recesses are formed in a surface of it to which light is incident; an apparatus for producing efficiently a solar cell by realizing the above-mentioned process, and a wet etching apparatus to effect stably the above-mentioned process to thereby maintaining a concentration of a nitric acid to be constant, are provided.

Solar cell, a method of producing the same and a semiconductor producing apparatus

In preparing a solar cell, minute projections and recesses are uniformly formed in a surface of a single crystal silicon substrate or a polycrystal silicon substrate by dipping the substrate in an etching liquid of a mixed acid including a hydrofluoride acid, a nitric acid and an adjusting agent containing at least a phosphoric acid or a water-soluble carboxylic acid having a higher molecular weight than acetic acid for adjusting the etching rate of the etching liquid. A solar cell having a substrate in which spherical projections and recesses are formed in a surface thereof to which light is incident; an apparatus for producing a solar cell, and a wet etching apparatus to maintain a constant concentration of a nitric acid, are provided.

Solar cell, a method of producing the same and a semiconductor producing

A process of forming electrodes is simplified during modularizing of a solar battery. According to the manufacturing method and the manufacturing apparatus, a thin solar battery is manufactured at a reduced cost and with a better yield. Using a robot which includes a suction chip which can handle a semiconductor film 2 without any damage which is separated from a particular substrate 1, the semiconductor films 2 are each accurately placed through a transparent resin 3 onto a glass substrate 7 which serves as a window of a solar battery, and p-type and n-type electrodes are printed at a time on the semiconductor films 2 which are arranged. Further, since a monolithic tab electrode is soldered to connect the electrodes, the manufacturing processes of the solar battery are simplified.

Method of and apparatus for manufacturing thin solar battery

A solar cell and a method of producing the same which realizes electrical separation of the p n junction in a simple manner, and a method of producing a semiconductor device a method of producing a semiconductor device in which an electrode is formed by using a metallic paste material on a substrate covered with a silicon nitride film or a titanium oxide film, wherein a glass paste 104 composed mainly of glass which has a property of melting silicon is provided on an n type diffusion layer 101 in the p n junction; the substrate is baked so that penetration of the n type diffusion layer 101 is effected by the glass paste; aluminum is diffused in the n type diffusion layer 101 below a p electrode 103 formed of an aluminum silver paste to thereby form a p type inversion layer 105 inverted to a p type, whereby the electrical separation of the p n junction can be realized. Further, when a metallic paste material is provided on an insulating film and the metallic paste material is baked, the material penetrates the insulating film to electrically contact with the semiconductor substrate.

Method of producing a solar cell; a solar cell and a method of producing

Method of producing a solar cell

A semiconductor device fabrication method for simple and high-reliability electrode formation capable of increasing a bond strength with solder when performing wiring through soldering. To form an electrode on a semiconductor substrate having a junction, the pattern of an aluminum paste electrode having an opening is formed and thereafter, the pattern of a silver-aluminum paste electrode or silver paste electrode is formed on the opening so as to overlap with the pattern of the electrode. Thereby, it is possible to increase the bond strength with solder of the silver-aluminum paste electrode or silver paste electrode on the opening without being alloyed with the aluminum paste electrode. It is also possible to improve the certainty of the electrical connection between the electrodes because the overlap between the metallic paste patterns is alloyed.

Semiconductor device fabrication method

A method of making the solar cells includes a step of forming a first electroconductive region on a first surface of a semiconductor substrate having through-holes defined therein and also having an emitter layer formed thereon, a step of disposing the semiconductor substrate on a transparent substrate with a second surface of the semiconductor substrate opposite to the first surface thereof confronting the transparent substrate through a resinous material, a step of bonding the semiconductor substrate and the transparent substrate together by means of the resinous material, and a step of forming a second electroconductive region on the first electroconductive region.

Method of making solar cells

A method for producing a thin film solar cell includes preparing a substrate of a low purity material and having opposed front and rear surfaces; forming an insulating film on the front surface of the substrate; forming a second conductivity type active layer of a high purity material on the insulating film with a front surface exposed; forming a second conductivity type semiconductor region within the active layer, reaching the front surface, to produce a p-n junction for light-to-electricity conversion; forming an anti-reflection film on the front surface of the active layer, the anti-reflection film reducing reflection of incident light; forming a surface electrode in contact with the front surface of the active layer; adhering the front surface side of the active layer to a supporting plate and selectively etching the low purity substrate from the rear surface to form a supporting substrate supporting the active layer; and forming a rear electrode on the rear surface of the supporting substrate contacting the active layer.

Method of producing thin film solar cell

A solar cell has a high ability to prevent recombination of electrons near the cell surface, wherein a surface of a p-type substrate at a surface is provided with an n-type region subjected to a treatment with a phosphorus containing acid and a silicon nitride layer is then directly formed on the n-type region. The solar cell can be prepared at a low temperature by a method comprising 1) a step of subjecting the n-type region to a phosphorus containing acid treatment at a low temperature and 2) a step of forming a silicon nitride by a vacuum and thermal CVD method.

Solar cell

A solar battery cell, solar battery module, and solar battery module group achieving high product value by enabling the display of surface patterns without reducing the power generating efficiency of the solar battery cells are provided. The direction and/or reflectance of reflected light incident to the surface of the solar battery cell are varied by controlling the distribution of the rough surface structure imparted to the solar battery cell surface. The direction or reflectance of reflected light incident to the surface of the solar battery cell is changed in part depending upon the part of the semiconductor solar battery cell surface to which the light is incident. Semiconductor solar battery cells with high product value can therefore be achieved because patterns with strong visual impact can be displayed and easily recognized without reducing the power generation efficiency of the solar battery cell.

Solar battery cell, a solar battery module, and a solar battery module

In a method for fabricating a thin film solar cell, a thin semiconductor film serving as a power generating layer is formed on a substrate via an intermediate layer, a plurality of holes are formed penetrating through the thin semiconductor film and reaching the intermediate layer, and the intermediate layer is etched away through the through-holes, separating the thin semiconductor film from the substrate with high-efficiency. Since stress is hardly applied to the thin semiconductor film during the separation process, cracking and breaking of the semiconductor film is avoided. Further, since the surface of the substrate is maintained in good condition, the substrate can be reused, resulting in a reduction in the production cost.

Method for producing thin film solar cell

A semiconductor laser device having a first conductivity type cladding layer, an active layer, and a second conductivity type cladding layer successively disposed on a first conductivity type substrate includes a superlattice semiconductor multi-layered structure disposed at least either between the active layer and the first conductivity type cladding layer or between the active layer and the second conductivity type cladding layer. The superlattice semiconductor multi-layered structure may include a multiquantum barrier and this multiquantum barrier may include a buffer layer for preventing tunneling disposed at the side of the active layer and a superlattice multi-layered film structure including plural barrier layers and plural well layers alternatingly laminated. As a result, light intensity at the laser facet is reduced, suppressing facet deterioration during high-power operation.

Semiconductor laser with superlattice cladding layer

An apparatus for zone-melting recrystallization of semiconductor films on semiconductor substrates includes a heater disposed opposite the front surface of a semiconductor substrate and moving across the semiconductor substrate at a uniform rate. The heater may be a strip heating element covered with an insulating and refractory material radiating less heat than the strip heating element. Since heat emitted from surfaces of the heating element except the surface opposite the substrate is intercepted by the insulating and refractory film, the width of the molten zone produced in the semiconductor film is reduced.

Zone-melting recrystallization of semiconductor materials

A method for producing a thin-film solar cell includes successively depositing a lower anti-reflection film having a relatively large etching rate in a prescribed etchant and an upper anti-reflection film having a relatively small etching rate in the prescribed etchant on a photosensitive surface of a semiconductor substrate; patterning the upper anti-reflection film to form an aperture; and etching the lower anti-reflection film using the patterned upper anti-reflection film as a mask.

Growing community of inventors

Itami, Japan

Satoshi Arimoto