Average Co-Inventor Count = 2.55
ph-index = 4
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mitsubishi Denki Kabushiki Kaisha (4 from 21,351 patents)
2. Renesas Technology Corp. (3 from 3,781 patents)
3. Ulvac Coating Corporation (3 from 15 patents)
4. Other (2 from 832,680 patents)
5. Mitsubishi Denki Kabushiki (1 from 26 patents)
10 patents:
1. 7323901 - Semiconductor integrated circuit device
2. 7306882 - Phase shift mask including a substrate with recess
3. 7063922 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
4. 7038486 - Semiconductor integrated circuit device
5. 7001698 - Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
6. 6881991 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof
7. 6685848 - METHOD AND APPARATUS FOR DRY-ETCHING HALF-TONE PHASE-SHIFT FILMS HALF-TONE PHASE-SHIFT PHOTOMASKS AND METHOD FOR THE PREPARATION THEREOF AND SEMICONDUCTOR CIRCUITS AND METHOD FOR THE FABRICATION THEREOF
8. 6503852 - Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device
9. 6433437 - Manufacturing process for semiconductor device, photomask, and manufacturing apparatus for semiconductor device
10. 6391791 - Dry-etching method and apparatus, photomasks and method for the preparation thereof, and semiconductor circuits and methods for the fabrication thereof