Seiko Instruments Inc

Satoru Yabe

Norio Chiba

Hiroshi Suzuki

Satoshi Nakayama

Yoshikazu Kojima

Hiroaki Takasu

Masaaki Kamiya

Tsuneo Yamazaki

Masaaki Taguchi

Ryuichi Takano

Osamu Takaoka

Nobuhiro Shimizu

Akikazu Odawara

First, a region including the defect is observed with the atomic force microscope (AFM) and a pattern putting together the shape and position of the defect is extracted from and AFM image. The extracted pattern is then converted to a shape format for a for an ion beam defect repairing apparatus and transferred. At this time, a pattern that is observable with the ion beam defect repairing apparatus is selected as a position alignment pattern. The extracted/converted position alignment pattern is combined with a pattern corresponding to a secondary electron image or a secondary ion image. Repairing of the irradiation region and similar repairing is then performed with respect to matching processing for a pattern for a normal secondary ion image or secondary electron image for the ion beam defect repairing apparatus and extraction is performed by the AFM. A defect region finely adjusted using alignment of the position alignment pattern is then corrected using an ion beam.

Mask defect repair method

A light valve has a composite substrate comprised of an electrically insulating substrate and a semiconductor single crystal thin film formed over the electrically insulating substrate. A pixel array comprising semiconductor switch elements is formed in the semiconductor single crystal thin film. A peripheral circuit having circuit elements is formed in the semiconductor single crystal thin film so that a small-sized, high speed light valve is obtained. X- driver and Y-driver circuits are formed in the semiconductor single crystal thin film and controlled by a control circuit, such as a video signal processing circuit, which receives and processes video signals inputted directly from an external source. The peripheral circuit can be a DRAM sense amplifier for sensing charges stored in each pixel of the pixel array to detect defects in the pixel array. The peripheral circuit can be a photosensor circuit for detecting an intensity of incident light to monitor the performance of a light source of the light valve. The peripheral circuit can be a temperature sensor for detecting the temperature of a liquid crystal layer of the light valve, and may be comprised of Darlington connected NPN transistors formed in the semiconductor single crystal thin film. The peripheral circuit can also be a solar cell for converting incident light into electrical energy to supply power to at least one of the pixel array, X-driver and Y-driver circuits and the peripheral circuit.

Light valve device

A process for forming a light valve device comprises forming a semiconductor single crystal film to form a composite substrate by polishing a semiconductor single crystal substrate after an electric insulating substrate has been bonded thereto; forming a group of pixel electrodes for defining a pixel region and a group of switch elements for selectively energizing the pixel electrodes by integrating a pixel array portion over the composite substrate; forming a liquid crystal aligning means for the pixel region; superposing an opposed substrate over the composite substrate with a gap therebetween; and filling the gap with liquid crystal material.

Light valve device making

DC-SQUID includes an input coil for transmitting an external magnetic field signal as a signal current from a detection coil, a washer coil to which the signal current is input as a signal magnetic flux, two Josephson devices for converting the signal magnetic flux transmitted to the washer coil to a signal voltage, shunt resistors and a damping resistor which are connected to each of the Josephson devices in parallel and in series respectively to extinguish the hysteresis of the current-voltage characteristic, and a feedback modulation coil to which a feedback and modulation current is transmitted from an external control circuit. The feedback modulation coil is arranged so as to linearly traverse over the upper portion or lower portion of the washer coil. The mutual inductance Mms between a washer coil and a feedback modulation coil is set to be smaller than the self inductance Lw of the washer coil, to thereby making the magnetic field sensitivity excellent, the SN ratio of an DS-SQUID is improved, and RF noises are reduced.

Highly sensitive magnetic field detector using low-noise DC SQUID

A DC SQUID has a first washer coil for forming a superconducting ring, Josephson junctions and a dampening resistor coupled to both ends of the first washer coil, and a shunting resistor connected in parallel to the Josephson junctions. An input coil is magnetically coupled with the first washer coil, and a first modulation coil is also magnetically coupled with the first washer coil. A ground plane comprising a superconducting film is disposed to cover an area of the Josephson junctions without covering the first washer coil for shielding the Josephson junctions from a magnetic noise. The ground plane prevents a magnetic flux trap from occurring, thus enabling stable operation of the DC SQUID. A washer cover comprising a superconducting film is disposed to cover only a slit portion of the first washer coil to prevent leakage of a magnetic field from the slit portion. The ground plane and the washer cover are simultaneously formed in a same layer of the DC SQUID. A second washer coil can be connected in series, or in parallel, with the first washer coil for forming the superconducting ring. The second washer coil is effective for canceling a uniform magnetic flux, thereby improving the operation of the DC SQUID.

DC superconducting quantum interference device with shield layer

Superconducting detection coils for a superconducting quantum interference device are foraged on a flexible printed wiring film having a pair of opposed edges. The flexible printed wiring film is capable of being shaped into a cylinder by bringing the opposed edges toward each other. A superconducting wiring pattern is formed on the flexible printed wiring film and has at least one substantially U-shaped wiring portion. The U-shaped wiring portion forms at least two circular wiring patterns when the printed wiring film is shaped into a cylinder by bringing the opposed edges toward each other. The superconducting wiring pattern also has a first and a second electrode portion for connecting the circular wiring patterns to at least one superconducting quantum interference device. A resistor is electrically connected between the electrode portions of the superconducting wiring pattern.

Growing community of inventors

Tokyo, Japan

Satoru Yabe