Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (2 from 10,295 patents)
2 patents:
1. 10424499 - Apparatus, method and non-transitory storage medium for accommodating and processing a substrate
2. 9627237 - Apparatus, method and non-transitory storage medium for accommodating and processing a substrate