Toyota Jidosha Kabushiki Kaisha

Denso Corporation

Meidensha Corporation

Satoru Kameyama

Shinya Iwasaki

Keisuke Kimura

Yuki Horiuchi

Sachiko Aoi

Masaki Koyama

Shuhei Oki

Yuki Yakushigawa

Hiroshi Hata

Jun Okawara

Tadashi Misumi

Makoto Niwakawa

Masaki Ajioka

Daisuke Kobayashi

Makoto Yokoyama

Seiichi Ito

Tomio Syuttou

A small semiconductor device having a diode forward voltage less likely to change due to a gate potential is provided. An anode and an upper IGBT structure (emitter and body) are provided in a range in the substrate exposed at the upper surface. A trench, a gate insulating film, and a gate electrode extend along a border of the anode and the upper IGBT structure. Cathode and collector are provided in a range in the substrate exposed at the lower surface. A drift is provided between an upper structure and a lower structure. A crystal defect region extends across the drift above the cathode and the drift above the collector. When a thickness of the substrate is defined as x [&#x3bc;m] and a width of a portion of the crystal defect region that protrudes above the cathode is defined as y [&#x3bc;m], y&#x2265;0.007x2&#x2212;1.09x+126 is satisfied.

Semiconductor device

The present application discloses a semiconductor device in which an IGBT region and a diode region are formed on one semiconductor substrate. The IGBT region includes: a collector layer; an IGBT drift layer; a body layer; a gate electrode; and an emitter layer. The diode region includes: a cathode layer; a diode drift layer; an anode layer; a trench electrode; and an anode contact layer. The diode region is divided into unit diode regions by the gate electrode or the trench electrode. In a unit diode region adjacent to the IGBT region, when seen in a plan view of the front surface of the semiconductor substrate, the anode layer and the anode contact layer are mixedly placed, and the anode contact layer is placed at least in a location opposite to the emitter layer with the gate electrode interposed therebetween.

Semiconductor device in which an insulated-gate bipolar transistor ( IGBT) region and a diode region are formed on one semiconductor substrate

An IGBT region includes a collector layer, a first drift layer, a first body layer, an emitter layer, and a trench gate reaching the first drift layer through the first body layer from a front surface side of a semiconductor substrate. A diode region includes a cathode layer, a second drift layer, and a second body layer. A lifetime control region which includes a peak of a crystal defect density is provided in the first drift layer and the second drift layer that are located between a depth of a lower end of the trench gate and surfaces of the first drift layer and the second drift layer. A silicon nitride film is further provided above the trench gate on the front surface side of the semiconductor substrate.

Semiconductor device and manufacturing method of semiconductor device

A semiconductor device includes a main IGBT region in which an IGBT is provided, a main diode region in which a diode is provided, a sense IGBT region in which an IGBT is provided, and a sense diode region in which a diode is provided. A clearance between the body region and the anode region is longer than a product of electron mobility and electron lifetime in the n-type region between the body region and the anode region. A clearance between an end of the collector region on a sense diode region side and the body region is longer than a product of electron mobility and electron lifetime in the n-type region between the end and the body region.

A semiconductor device includes: a plurality of trenches provided in an upper surface of a semiconductor substrate; trench electrodes each provided in a corresponding one of the trenches; a first semiconductor layer of a first conductivity type provided in a first range interposed between adjacent ones of the trenches; a second semiconductor layer of a second conductivity type; a third semiconductor layer of the first conductivity type; an interlayer insulation film provided on the upper surface of the semiconductor substrate and including a plurality of contact holes; a first conductor layer provided in each of the contact holes; and a surface electrode provided on the interlayer insulation film and connected to each of the first conductor layers.

Semiconductor device and method of manufacturing semiconductor device having parallel contact holes between adjacent trenches

Provided is a technology for further reducing a loss in a semiconductor device including a semiconductor substrate in which an IGBT region and a diode region are provided. This semiconductor device includes a semiconductor substrate in which at least one IGBT region and at least one diode region are provided. The IGBT region and the diode region are adjacent to each other in a predetermined direction in a plan view of the semiconductor substrate. In the plan view of the semiconductor substrate, a first boundary plane where the collector region and the cathode region are adjacent is shifted from a second boundary plane where the IGBT region and the diode region are adjacent on the front surface side of the semiconductor substrate either in a direction from the cathode region toward the collector region or in a direction from the collector region toward the cathode region.

Semiconductor device having adjacent IGBT and diode regions with a shifted boundary plane between a collector region and a cathode region

The re-combination center introduction region has re-combination centers introduced therein so that a density of the re-combination centers in the re-combination center introduction region is higher than a density of re-combination centers in a periphery of the re-combination center introduction region. The re-combination center introduction region continuously extends from the diode region to the peripheral region along a longitudinal direction of the diode region.

A semiconductor device including a semiconductor substrate in which a diode region and an IGBT region are formed is provided. In the semiconductor device, the diode region includes a second conductivity type cathode layer. An impurity concentration of second conductivity type impurities of the cathode layer is distributed in a curve pattern having at least two peaks, and the impurity concentration of the second conductivity type impurities is higher than that of first conductivity type impurities at all depths of the cathode layer.

Semiconductor device and method for manufacturing the same

An influence of a gate interference is suppressed and a reverse recovery property of a diode is improved. A diode includes a diode region located between the first boundary trench and the second boundary trench and a first and second IGBT regions. An emitter region and a body region are provided in each of the first and second IGBT regions. Each body region includes a body contact portion. An anode region is provided in the diode region. The anode region includes an anode contact portion. An interval between the first and second boundary trenches is equal to or longer than 200 &#x3bc;m. An area ratio of the anode contact portion in the diode region is lower than each of an area ratio of the body contact portion in the first IGBT region and an area ratio of the body contact portion in the second IGBT region.

A structure having high, middle, and low impurity concentration regions disposed from a surface side of a substrate is more suitably manufactured. A method of manufacturing a semiconductor device includes: a first implantation of first conductivity type impurities into a first conductivity type semiconductor substrate from a surface; melting and solidifying a first semiconductor region between a depth and the surface, wherein the depth is deeper than a depth having a peak impurity concentration in an increased region where the impurity concentration was increased in the first implantation, and shallower than a deeper end of the increased region; a second implantation of the impurities from the surface into a region shallower than the depth; and melting and solidifying a region in which the impurity concentration was increased in the second implantation.

Method of manufacturing semiconductor device and semiconductor device

A method of manufacturing a semiconductor device includes a semiconductor region forming process, a cleaning process, a surface roughness uniformizing process, and an electrode forming process. As the semiconductor region forming process, semiconductor regions are formed such that a plurality of semiconductor regions with different ion injection amounts are exposed on one principal surface of a semiconductor substrate. As the cleaning process, after the semiconductor region forming process, a cleaning using hydrofluoric acid is performed on the one principal surface of the semiconductor substrate. As the surface roughness uniformizing process, after the cleaning process, the surface roughness of the one principal surface of the semiconductor substrate is uniformized. As the electrode forming process, after the surface roughness uniformizing process, electrodes are formed on the one principal surface of the semiconductor substrate.

Method of manufacturing semiconductor device

A semiconductor device includes an interlayer insulating film in which first contact holes and second contact holes are provided. Each of the second contact holes has a width narrower than a width of the corresponding first contact hole. A contact plug is located in the corresponding second contact hole. An upper electrode layer is arranged on an upper surface of the interlayer insulating film, upper surfaces of the contact plugs, and inner surfaces of the first contact holes. The protective insulating film covers an upper surface of the external field. An end portion extending along a direction intersecting with the plurality of trenches of the protective insulating film extends through a range located above the plurality of the second contact holes. A pillar region is in contact with the upper electrode layer in the first contact hole.

Semiconductor device and manufacturing method thereof

A semiconductor device comprises a conductive layer, a first insulating film, a barrier metal, a contact electrode, and a surface electrode. The first insulating film is located on the conductive layer and comprises a contact hole reaching the conductive layer. At least a surface part of the first insulating film is a BPSG film. The barrier metal covers an inner surface of the contact hole. The contact electrode is located in the contact hole and on the barrier metal. The surface electrode is located on the BPSG film and the contact electrode. The barrier metal is not interposed between the BPSG film and the surface electrode so that the surface electrode is directly in contact with the BPSG film. At least a part of the surface electrode is a bonding pad.

Semiconductor device and manufacturing method therefor

A semiconductor device, in which, in a density distribution of first conductivity type impurities in the first conductivity type region measured along a thickness direction of the semiconductor substrate, a local maximum value N, a local minimum value N, a local maximum value N, and a density Nare formed in this order from front surface side, a relationship of N&#x3e;N&#x3e;N&#x3e;Nis satisfied, a relationship of N/10&#x3e;Nis satisfied, and a distance 'a' from the surface to the depth having the local maximum value Nis larger than twice a distance 'b' from the depth having the local maximum value Nto the depth having the local minimum N

Semiconductor device and method for manufacturing semiconductor device

A semiconductor module is provided with a high potential wiring, an output wiring, a low potential wiring, an upper arm switching device, an upper arm diode, a lower arm switching device, and a lower arm diode. A ratio of steady loss to switching loss of the upper arm switching device is configured to be smaller than a ratio of steady loss to switching loss of the lower arm switching device. Further, a ratio of steady loss to switching loss of the upper arm diode is configured to be smaller than a ratio of steady loss to switching loss of the lower arm diode.

Growing community of inventors

Toyota, Japan

Satoru Kameyama