Kurashiki Boseki Kabushiki Kaisha

Tokyo Electron Limited

Chemical Art Technology, Inc.

Satoru Hiraki

Hiromi Kiyose

Hiroshi Yokota

Hideaki Sato

Hiroshi Komiya

Noboru Higashi

Nobuyoshi Yasuda

Hiroshi Watanabe

A substrate processing device, which processes by immersing the substrate in the processing liquid comprising a mixture of a chemical and a diluting liquid, is provided with: a processing tank () that retains the processing liquid; heating means () that heat the processing liquid; a temperature detection means () that detects the temperature of the processing liquid; a temperature control means () that operates the aforementioned heating means () in a manner so that the detected temperature approaches a set temperature; a replenishing means () that replenishes the diluting liquid in the processing liquid; a concentration detection means () that detects the concentration of the processing liquid by measuring the light absorption characteristics of the processing liquid; and a concentration control means () that operates the aforementioned replenishing means () in a manner so that the detected concentration approaches a set concentration.

Substrate processing apparatus

A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

A liquid component concentration meter measures the concentration of a liquid in a liquid supply tube from outside the liquid supply tube. The concentration meter includes a liquid supply tube; a light transmission unit; a light emission unit for irradiating light to the light transmission unit; a light reception unit for receiving light passed through the light transmission unit; a support member that movably supports the light emission unit and the light reception unit such that a measurement position is moved along the light transmission unit; a measurement-position moving mechanism for moving the support member such that the measurement position is moved within a predetermined area in the light transmission unit; and a data processing unit for calculating the concentration of the liquid in the liquid supply tube based on intensities of light received by the light reception unit at different measurement positions.

Liquid densitometer

Growing community of inventors

Neyagawa, Japan

Satoru Hiraki