Ulvac, Inc.

Sanyo Electric Co., Ltd.

Satohiro Okayama

Yoshiaki Yamamoto

Masaki Shima

Shuji Osono

Yoshinori Wakamiya

Hideyuki Ogata

Young-Doo Kim

Yoshinori Obise

An ion beam irradiation device includes a vacuum chamber that accommodates a transport tray which holds a substrate, a transport unit that transports the transport tray in the vacuum chamber in a transport direction, an ion beam irradiation unit that irradiates, with ion beams, a predetermined irradiation position in the vacuum chamber, and a position detector that detects a position of the transport tray. The transport tray includes a plurality of indices that are arranged in the transport direction to indicate portions of the transport tray. The position detector images each of the indices at a predetermined imaging position during transportation of the transport tray and detects a position of the transport tray relative to the imaging position based on the imaged index.

Ion beam irradiation device

In a catalytic CVD equipment, a holder includes an antireflective structure for preventing reflection of a radiant ray that is ejected from the catalytic wire toward the side of the substrate.

Catalytic CVD equipment, method for formation of film, process for production of solar cell, and substrate holder

Growing community of inventors

Chigasaki, Japan

Satohiro Okayama