Ulvac, Inc.

Satoaki Ikeuchi

Hirohiko Murakami

Hiroyuki Yamakawa

Daisuke Omori

An object of the present invention is to provide an apparatus and a method by which quantities of water vapor passing through a measured object can be measured with high sensitivity and in a short time period. The apparatus and method measure water vapor permeability of the measured object based on a dew point temperature in a second space measured after introducing water vapor into a first space, wherein the first space and the second space are parted from each other by the measured object, and wherein the first space is maintained at a predetermined temperature and a predetermined humidity under atmospheric pressure, and the second space is maintained in a dry state with a dew point temperature of &#x2212;70&#xb0; C. or less under atmospheric pressure.

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Kanagawa, Japan

Satoaki Ikeuchi