Samsung Electronics Co., Ltd.

Sathyanarayanan Kulasekaran

Gaurav Kumar

Shashank Shrikant Agashe

Sameera Bharadwaja Hayavadana

Yunje Cho

Lakshmi Narayana Pedapudi

Sung Ha Kim

Chanwoo Park

Wan Sung Park

Example embodiments may provide methods for determining a quality of a film in spin coating process. The methods may include capturing images of portions of the film using an imaging device while coating the film on a substrate using a spinner. The imaging device may include SPCs and lens and/or SLMs. The methods may also include determining whether a characteristic of the film matches to a standard based on the images of the portions of the film. The method may further include performing detecting that the quality of the film is optimal in response to determining that the characteristic of the film matches to the standard or detecting that the quality of the film is not optimal in response to determining that the characteristic of the film does not match to the standard.

Methods and systems for real-time quality control of a film in a spin coating process

The present disclosure relates to a method for estimating heights of defects in a wafer. The method comprises creating an un-calibrated 3D model of a defect in a wafer, determining one or more attributes associated with the un-calibrated 3D model, transforming the un-calibrated 3D model to a calibrated 3D model, and estimating a height of the defect using the calibrated 3D model. Creating an un-calibrated 3D model corresponds to a defect present in a wafer based on a plurality of Scanning Electron Microscope (SEM) images of the defect. Transforming the un-calibrated 3D model to a calibrated 3D model uses a scaling factor corresponding to the determined one or more attributes associated with the un-calibrated 3D model. A height of the defect is estimated based on the calibrated 3D model of the defect.

Estimating heights of defects in a wafer by scaling a 3D model using an artificial neural network

Growing community of inventors

Bengaluru, India

Sathyanarayanan Kulasekaran