Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Varian Semiconductor Equipment Associates, Inc. (3 from 916 patents)
3 patents:
1. 12104253 - Techniques for controlling precursors in chemical deposition processes
2. 11718914 - Techniques for controlling precursors in chemical deposition processes
3. 10822699 - Techniques for controlling precursors in chemical deposition processes