Globalfoundries U.S. Inc.

Globalfoundries Inc.

Sarah A McTaggart

Qizhi Liu

Steven M Shank

Vibhor Jain

Rajendran Krishnasamy

Mark Levy

James William Adkisson

Edward Crandal Cooney, Iii

Michel J Abou-Khalil

Alexander M Derrickson

Ramsey M Hazbun

Cameron E Luce

James Randall Elliott

Gary L Milo

Dinh Dang

Aaron Vallett

David A DeMuynck

Uppili S Raghunathan

Paula Fisher

Melissa J Roma

Thomas W Weeks

Megan Elizabeth Lydon-Nuhfer

Jeffrey L Thompson

The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor and methods of manufacture. The structure includes: a collector region; an extrinsic base comprising an emitter opening with an angled sidewall; an emitter within the emitter opening; and an intrinsic base between the emitter and the collector.

Bipolar transistor

Semiconductor structures including electrical isolation and methods of forming a semiconductor structure including electrical isolation. The structure includes a semiconductor substrate having a first surface, a recess in the first surface, and a second surface inside the first recess. The structure further includes a shallow trench isolation region extending from the first surface into the semiconductor substrate. The shallow trench isolation region is positioned to surround an active device region including the recess. A field-effect transistor includes a gate electrode positioned on a portion of the second surface.

Field-effect transistors having a gate electrode positioned inside a substrate recess

Disclosed are a structure including a transistor and a method of forming the structure. The transistor includes an emitter region with first and second emitter portions. The first emitter portion extends through a dielectric layer. The second emitter portion is on the first emitter portion and the top of the dielectric layer. An additional dielectric layer covers the top of the second emitter portion. The second emitter portion and the dielectric and additional dielectric layers are wider than the first emitter portion. At least a section of the second emitter portion is narrower than the dielectric and additional dielectric layers, thereby creating cavities positioned vertically between edge portions of the dielectric and additional dielectric layers and positioned laterally adjacent to the second emitter portion. The cavities are filled with dielectric material or dielectric material blocks the side openings to the cavities creating pockets of air, of gas or under vacuum.

Vertical bipolar junction transistor and method

Device structures and fabrication methods for heterojunction bipolar transistors. Trench isolation regions are positioned in a semiconductor substrate to define active regions. A base layer includes first sections that are respectively positioned over the active regions and second sections that are respectively positioned over the trench isolation regions. Emitter fingers are respectively positioned on the first sections of the base layer. The first sections of the base layer include single-crystal semiconductor material, and the second sections of the base layer include polycrystalline semiconductor material. The second sections of the base layer are spaced in a vertical direction from the trench isolation regions to define a first cavity that extends about a perimeter of the base layer and second cavities that are connected to the first cavity.

Heterojunction bipolar transistors with undercut extrinsic base regions

Device structures and fabrication methods for heterojunction bipolar transistors. Trench isolation regions are arranged to surround a plurality of active regions, and a collector is located in each of the active regions. A base layer includes a plurality of first sections that are respectively arranged over the active regions and a plurality of second sections that are respectively arranged over the trench isolation regions. The first sections of the base layer contain single-crystal semiconductor material, and the second sections of the base layer contain polycrystalline semiconductor material. The second sections of the base layer are spaced in a vertical direction from the trench isolation regions to define a plurality of cavities. A plurality of emitter fingers are respectively arranged on the first sections of the base layer.

Heterojunction bipolar transistors with multiple emitter fingers and undercut extrinsic base regions

A method including forming a first metal wire in a first dielectric layer, the first metal wire including a first vertical side opposite from a second vertical side; and forming a second metal wire in a second dielectric layer above the first dielectric layer, the second metal wire including a third vertical side opposite from a fourth vertical side, where the first vertical side is laterally offset from the third vertical side by a first predetermined distance, and the second vertical side is laterally offset from the fourth vertical side by a second predetermined distance, where the first metal wire and the second metal wire are in direct contact with one another.

Metal wires of a stacked inductor

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South Burlington, VT, United States of America

Sarah A McTaggart