Intel Corporation

Tahoe Research, Ltd.

Sansaptak W Dasgupta

Marko Radosavljevic

Han Wui Then

Robert S Chau

Paul B Fischer

Sanaz Kabehie Gardner

Seung Hoon Sung

Benjamin Chu-Kung

Ravi Pillarisetty

Walid M Hafez

Niloy Mukherjee

Van H Le

Jack T Kavalieros

Matthew V Metz

Niti Goel

Gilbert W Dewey

Rahul Ramaswamy

Nidhi Nidhi

Willy Rachmady

Johann Christian Rode

Bruce A Block

Valluri Ramana Rao

Nancy M Zelick

Kevin Lai Lin

Khaled Ahmed

Harald Gossner

Peter Baumgartner

Stephan Leuschner

Richard Geiger

Patrick R Morrow

Kimin Jun

Domagoj Siprak

Anup Pancholi

Uwe Hodel

Sherry R Taft

Peter G Tolchinsky

Brian S Doyle

Glenn A Glass

Stephen M Cea

Gerhard Schrom

Harold W Kennel

John Heck

Roza Kotlyar

Ibrahim Ban

Thomas L Sounart

James M Powers

Richard F Vreeland

Pragyansri Pathi

Alejandro X Levander

Nicholas James Harold McKubre

Seung Hoon Hoon Sung

Pavel M Agababov

Anand S Murthy

Abhishek A Sharma

James S Clarke

Prashant Majhi

Jeanette M Roberts

Nicole K Thomas

Hubert C George

David J Michalak

Zdravko Boos

Zachary R Yoscovits

Ivan-Christophe Robin

Roman Caudillo

Lester Lampert

Kanwaljit Singh

Satyarth Suri

Tristan A Tronic

Gregory W Chance

Jessica S Kachian

Robert B Turkot, Jr

Harel Frish

Nebil Tanzi

Marc C French

Yang Cao

Georgios Panagopoulos

Sanaz Kabehie

Luis Giles

Chad E Mair

Sandrine Charue-Bakker

Samuel Jack Beach

Rajat K Paul

Benjamin Chu-King

Nitika Goel

Heli Chetanbhai Vora

Xiaojun Weng

Mark Radosavljevic

Nicholas McKubre

Marko Radosavlijevic

Disclosed herein are IC devices, packages, and device assemblies that include III-N diodes with n-doped wells and capping layers. An example IC device includes a support structure and a III-N layer, provided over a portion of the support structure, the III-N layer including an n-doped well of a III-N semiconductor material having n-type dopants with a dopant concentration of at least 5×10dopants per cubic centimeter. The IC device further includes a first and a second electrodes and at least one capping layer. The first electrode interfaces a first portion of the n-doped well. The capping layer interfaces a second portion of the n-doped well and includes a semiconductor material with a dopant concentration below 10dopants per cubic centimeter. The second electrode is provided so that the capping layer is between the second portion of the n-doped well and the second electrode.

III-N diodes with n-doped wells and capping layers

Disclosed herein are IC structures, packages, and devices that include Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si transistors or other non-Si-based devices. In some aspects, the Si-based semiconductor material stack may be provided by semiconductor regrowth over an insulator material. Providing a Si-based semiconductor material stack monolithically integrated on the same support structure as non-Si based devices may provide a viable approach to integrating Si-based transistors with non-Si technologies because the Si-based semiconductor material stack may serve as a foundation for forming Si-based transistors.

Integration of Si-based transistors with non-Si technologies by semiconductor regrowth over an insulator material

Embodiments of the invention include a microelectronic device that includes a substrate, at least one dielectric layer on the substrate and a plurality of conductive lines within the at least one dielectric layer. The microelectronic device also includes an air gap structure that is located below two or more of the plurality of conductive lines.

Microelectronic devices having air gap structures integrated with interconnect for reduced parasitic capacitances

A device including a III-N material is described. In an example, the device has terminal structure having a first group III-Nitride (III-N) material. The terminal structure has a central body and a first plurality of fins, and a second plurality of fins, opposite the first plurality of fins. A polarization charge inducing layer is above a first portion of the central body. A gate electrode is above the polarization charge inducing layer. The device further includes a source structure and a drain structure, each including impurity dopants, on opposite sides of the gate electrode and on the plurality of fins, and a source contact on the source structure and a drain contact on the drain structure.

Group III-nitride (III-N) devices with reduced contact resistance and their methods of fabrication

A transistor includes a polarization layer above a channel layer including a first III-Nitride (III-N) material, a gate electrode above the polarization layer, a source structure and a drain structure on opposite sides of the gate electrode, where the source structure and a drain structure each include a second III-N material. The transistor further includes a silicide on at least a portion of the source structure or the drain structure. A contact is coupled through the silicide to the source or drain structure.

Silicide for group III-nitride devices and methods of fabrication

A variable capacitance III-N device having multiple two-dimensional electron gas (2DEG) layers are described. In some embodiments, the device comprises a first source and a first drain; a first polarization layer adjacent to the first source and the first drain; a first channel layer coupled to the first source and the first drain and adjacent to the first polarization layer, the first channel layer comprising a first 2DEG region; a second source and a second drain; a second polarization layer adjacent to the second source and the second drain; and a second channel layer coupled to the second source and the second drain and adjacent to the second polarization layer, the second channel layer comprising a second 2DEG region, wherein the second channel layer is over the first polarization layer.

Variable capacitance device with multiple two-dimensional electron gas (2DEG) layers

Disclosed herein are IC structures, packages, and devices that include III-N transistor arrangements that may reduce nonlinearity of off-state capacitance of the III-N transistors. In various aspects, III-N transistor arrangements limit the extent of access regions of the transistors, compared to conventional implementations, which may limit the depletion of the access regions. Due to the limited extent of the depletion regions of a transistor, the off-state capacitance may exhibit less variability in values across different gate-source voltages and, hence, exhibit a more linear behavior during operation.

III-N transistor arrangements for reducing nonlinearity of off-state capacitance

Techniques related to III-N transistors having improved performance, systems incorporating such transistors, and methods for forming them are discussed. Such transistors include first and second crystalline III-N material layers separated by an intervening layer other than a III-N material such that the first crystalline III-N material layer has a first crystal orientation that is inverted with respect to a second crystal orientation of the second crystalline III-N material layer.

Tunnel polarization junction III-N transistors

A device includes a layer including a first III-Nitride (III-N) material, a channel layer including a second III-N material, a release layer including nitrogen and a transition metal, where the release layer is between the first III-N material and the second III-N material. The device further includes a polarization layer including a third III-N material above the release layer, a gate structure above the polarization layer, a source structure and a drain structure on opposite sides of the gate structure where the source structure and the drain structure each include a fourth III-N material. The device further includes a source contact on the source structure and a drain contact on the drain structure.

III-N multichip modules and methods of fabrication

A transistor is disclosed. The transistor includes a substrate, a superlattice structure that includes a plurality of heterojunction channels, and a gate that extends to one of the plurality of heterojunction channels. The transistor also includes a source adjacent a first side of the superlattice structure and a drain adjacent a second side of the superlattice structure.

Superlattice FINFET with tunable drive current capability

Disclosed herein are IC structures, packages, and devices that include transistors, e.g., III-N transistors, having a source region, a drain region (together referred to as 'source/drain' (S/D) regions), and a gate stack. In one aspect, a contact to at least one of the S/D regions of a transistor may have a width that is smaller than a width of the S/D region. In another aspect, a contact to a gate electrode material of the gate stack of a transistor may have a width that is smaller than a width of the gate electrode material. Reducing the width of contacts to S/D regions or gate electrode materials of a transistor may reduce the overlap area between various pairs of these contacts, which may, in turn, allow reducing the off-state capacitance of the transistor. Reducing the off-state capacitance of III-N transistors may advantageously allow increasing their switching frequency.

III-N transistors with contacts of modified widths

Light emitting devices employing one or more Group III-Nitride polarization junctions. A III-N polarization junction may include two III-N material layers having opposite crystal polarities. The opposing polarities may induce a two-dimensional charge carrier sheet within each of the two III-N material layers. Opposing crystal polarities may be induced through introduction of an intervening material layer between two III-N material layers. Where a light emitting structure includes a quantum well (QW) structure between two Group III-Nitride polarization junctions, a 2D electron gas (2DEG) induced at a first polarization junction and/or a 2D hole gas (2DHG) induced at a second polarization junction on either side of the QW structure may supply carriers to the QW structure. An improvement in quantum efficiency may be achieved where the intervening material layer further functions as a barrier to carrier recombination outside of the QW structure.

Group III-nitride light emitting devices including a polarization junction

Disclosed herein are IC structures, packages, and devices that include III-N transistors integrated on the same support structure as non-III-N transistors (e.g., Si-based transistors), using semiconductor layer transfer. In one aspect, a non-III-N transistor may be integrated with an III-N transistor by, first, depositing a semiconductor material layer, a portion of which will later serve as a channel material of the non-III-N transistor, on a support structure different from that on which the III-N semiconductor material for the III-N transistor is provided, and then performing layer transfer of said semiconductor material layer to the support structure with the III-N material, e.g., by oxide-to-oxide bonding, advantageously enabling implementation of both types of transistors on a single support structure. Such integration may reduce costs and improve performance by enabling integrated digital logic solutions for III-N transistors and by reducing losses incurred when power is routed off chip in a multi-chip package.

Integration of III-N transistors and semiconductor layer transfer

Disclosed herein are integrated circuit (IC) components with dummy structures, as well as related methods and devices. For example, in some embodiments, an IC component may include a dummy structure in a metallization stack. The dummy structure may include a dummy material having a higher Young's modulus than an interlayer dielectric of the metallization stack.

Integrated circuit components with dummy structures

Methods, apparatus, systems and articles of manufacture are disclosed for transistors including first and second semiconductor materials between source and drain regions. An example apparatus includes a first semiconductor material and a second semiconductor material adjacent the first semiconductor material. The example apparatus further includes a source proximate the first semiconductor material and spaced apart from the second semiconductor material. The example apparatus also includes a drain proximate the second semiconductor material and spaced apart from the first semiconductor material. The example apparatus includes a gate located between the source and the drain.

Transistors including first and second semiconductor materials between source and drain regions and methods of manufacturing the same

Growing community of inventors

Hillsboro, CA, United States of America

Sansaptak W Dasgupta