Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Silicon Valley Group, Thermal Systems Llp (1 from 7 patents)
1 patent:
1. 6465044 - Chemical vapor deposition of silicon oxide films using alkylsiloxane oligomers with ozone