Micron Technology Incorporated

Intel Corporation

Saniya Rathod

Matthew J King

Fei Wang

Matthew Park

Jun Fang

Rutuparna Narulkar

David A Daycock

Qian Tao

Christopher J Larsen

Rithu K Bhonsle

Srivardhan Gowda

Devesh Kumar Datta

A semiconductor device structure that comprises tiers of alternating dielectric levels and conductive levels and a carbon-doped silicon nitride over the tiers of the staircase structure. The carbon-doped silicon nitride excludes silicon carbon nitride. A method of forming the semiconductor device structure comprises forming stairs in a staircase structure comprising alternating dielectric levels and conductive levels. A carbon-doped silicon nitride is formed over the stairs, an oxide material is formed over the carbon-doped silicon nitride, and openings are formed in the oxide material. The openings extend to the carbon-doped silicon nitride. The carbon-doped silicon nitride is removed to extend the openings into the conductive levels of the staircase structure. Additional methods are disclosed.

Semiconductor devices comprising carbon-doped silicon nitride and related methods

Computer memory technology is disclosed. In one example, a method for isolating computer memory blocks in a memory array from one another can include forming an opening between adjacent blocks of memory structures. The method can also include forming a protective liner layer on at least the memory structures. The method can further include disposing isolating material in the opening and on the protective liner layer. The method can even further include removing the isolating material on the protective liner layer. The method can additionally include removing the protective liner layer on the memory structures. Associated devices and systems are also disclosed.

Computer memory

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Boise, ID, United States of America

Saniya Rathod