Samsung Electronics Co., Ltd.

Sangyeob Cha

Myeongjin Kim

Youngsoo Park

Jungil Ahn

WanGoo Hwang

Youngsam An

An apparatus to form semiconductor devices includes an inner tube and an outer tube disposed to surround the inner tube. A plate is disposed at first open end of the inner tube to reduce variation between pressures at a first portion and a second portion inside the inner tube. The sum of areas of through-holes disposed on the plate is 10 to 60 percent of the entire area of the plate. The through-holes may include a first through-hole that is disposed at a central portion of the plate, and second through-holes disposed at an edge portion of the plate. The second through-holes are annularly arranged to surround the first through-hole.

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Seoul, South Korea

Sangyeob Cha