Semes Co., Ltd.

Sanguk Son

Daesung Kim

Jaeyong Choi

Donghwa Lee

Daigeon Yoon

Dae Sung Kim

Kihoon Choi

Jae-Youl Kim

Beomjeong Oh

Jeeyong Jung

Young Ho Seo

Kwangbok Jun

Hyungoo Kwon

An ink tank for a liquid chemical discharging apparatus configured to prevent equipment failure and improve durability by preventing scattering and backflow of a liquid chemical is described. The ink tank for a liquid chemical discharging apparatus includes: a liquid chemical receiving portion in which a liquid chemical is stored; a liquid chemical discharge port configured to supply the liquid chemical to an inkjet head; a pressure control port configured to control pressure of the liquid chemical receiving portion; and a partition wall provided in the liquid chemical receiving portion and configured to partition the liquid chemical receiving portion.

Ink tank for liquid chemical discharging apparatus and liquid chemical discharging apparatus including the same

The present invention relates to real time discharging droplet compensating apparatus and method capable of compensating a discharging degree in real time by feeding-back drop information. To this end, the present invention provides a real time discharging droplet compensating apparatus which is configured by including a discharge control unit controlling the driving of an inkjet head; and a drop measurement unit provided below a substrate to measure drop information of a droplet to be discharged on the substrate and feed-back the measured drop information to the drop measurement unit, wherein the discharge control unit compensates a nozzle waveform of discharging the droplet by using the drop information. Therefore, according to the present invention, the position, size, and volume information of the drop are measured at the same time to be fed-back to the inkjet head unit in real time, thereby acquiring drop information without movement of a separate head unit.

Real time drop information measurement unit and real time discharging droplet compensating apparatus and method using the same

An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.

Apparatus for supplying chemical liquid

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Suwon-si, South Korea

Sanguk Son