Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Industry-university Cooperation Foundation Hanyang University

Sanguk Park

Jongju Park

Donghyun Yeom

Jinyoung Park

Jonghyung Kwun

Hwanjin Kim

Hyunpil Kim

Changho Kim

Hakseung Han

Raewon Yi

Yangwoon Roh

Bongsoo Jung

Dongjo Park

Myunggyun Yoon

Jongkeun Oh

Heonsoon Jang

Yeonjea Cho

Seyeong Cheon

Jungwon Lee

Jinwoo Kim

Seungri Jin

Junghyun Park

Yongyoun Kim

Chaiman Lim

Tae-Gon Kim

Byunghoon Lee

Changyoung Jeong

Jongsung Lee

Wonchul Choi

Yongwoo Kim

Jinho Ahn

Wanchul Seung

Seongho Son

Daeho Kang

Daeman Ko

Sunghyun Na

Wooseok Oh

Jin Goo Park

Youngchang Seo

Gyeongcheon Jo

Hyun-tae Kim

A correcting apparatus of an extreme ultraviolet (EUV) photomask includes: a support portion configured to support an EUV photomask having a main area in which a plurality of pattern elements are arranged, a chemical supply unit configured to supply a chemical to the main area, a light source unit configured to generate a laser beam, and a control unit configured to irradiate the laser beam to the chemical supplied to the main area of the EUV photomask and to, based a laser dosage map for correcting critical dimensions (CDs) of the plurality of pattern elements in the main area, adjust a dosage of the laser beam based on the laser dosage map such that among the plurality of pattern elements, pattern elements having different critical dimensions are etched at different etching rates.

Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask

A method is provided. The method includes preparing a mask blank, the mask blank including a substrate, a reflective layer disposed on the substrate for reflecting extreme ultraviolet light, and a light absorbing layer disposed on the reflective layer; providing a photomask by forming a plurality of pattern elements having a target critical dimension from the light absorbing layer, wherein the plurality of pattern elements include a correction target pattern element to be corrected, and the correction target pattern element has a critical dimension different from the target critical dimension; identifying a correction target area of the photomask in which the correction target pattern element is disposed; applying an etchant to the photomask; and irradiating a laser beam to the correction target area while the etchant is provided on the photomask.

Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask

An electronic device is provided. The electronic device includes a first housing, a second housing foldably connected to the first housing through a hinge device, a flexible display disposed to be supported by the second housing through the hinge device from the first housing, and a protective frame disposed on the second housing with edges of the flexible display interposed, wherein a conductive member is disposed based on at least one pattern between the protective frame and the edges of the flexible display.

Method and electronic device for improving antenna performance

In a method of recovering a bootloader in a mobile electronic device, a bootloader recovery signal is transmitted from a bridge board to the mobile electronic device. The bridge board includes a first internal path and a second internal path. The mobile electronic device includes a third internal path and a fourth internal path. The bootloader recovery request signal is transmitted based on the first internal path and the third internal path. a boot mode of the mobile electronic device is changed based on the first internal path and the fourth internal path in response to receiving the bootloader recovery request signal. Bootloader recovery data is transmitted from a host device to the bridge board based on the changed boot mode. The bootloader recovery data is transmitted from the bridge board to the mobile electronic device based on the second internal path and the third internal path.

Method of recovering bootloader in mobile electronic device and bootloader recovery system performing thereof

A pellicle cleaning apparatus includes a stage to support a pellicle, a particle remover above the stage, the particle remover being configured to remove a particle from a first surface of a pellicle, and the particle remover including a cantilever, and an adhesive material on a bottom surface of the cantilever, and a pressure controller adjacent to the stage, the pressure controller being configured to control a pressure of a fluid on a second surface of the pellicle.

Pellicle cleaning apparatus and pellicle cleaning method using the same

A laser annealing method performed on a reflective photomask may include preparing a reflective photomask including a pattern area and a border area surrounding the pattern area and irradiating a laser beam onto the border area of the reflective photomask. The irradiating of the laser beam may include split-irradiating a plurality of laser beam spots onto the border area. Each of the plurality of laser beam spots may be shaped using a beam shaper. The beam shaper may include a blind area, a transparent area at a center of the blind area, and a semitransparent area between the blind area and the transparent area. Each of the plurality of laser beam spots may include a center portion passing through the transparent area and having a uniform energy profile and an edge portion passing through the semitransparent area and having an inclined energy profile.

Method of annealing reflective photomask by using laser

Disclosed is an electronic device including a memory and a processor electrically connected with the memory. The memory stores instructions that, when executed, cause the processor to control the electronic device to: obtain information about a maximum value of brightness of image content based on metadata of the image content, to perform tone mapping on at least one or more frames corresponding to a preview image of the image content based on the information about the maximum value of the brightness, and to output the preview image based on the at least one or more frames on which the tone mapping is performed, on a display device.

Electronic device for processing image and image processing method thereof

An electronic device includes a communication interface operable to perform contactless communication with an external device; and a processor operable to control to determine a communication type to be performed with the external device; when the communication type is a first type of continuous communication, configure data in a long packet structure; when the communication type is a second type of discontinuous communication, configure data in a short packet structure; and perform data communication in the continuous communication or in the discontinuous communication with the external device on the basis of the determined communication type.

Continuous communication method and apparatus of contactless communication device

Disclosed is a geofencing server including a memory configured to store a database including wireless fingerprint information for a point-of-interest (PoI), a communication module configured to perform communication with an electronic device, and a processor connected to the memory and the communication circuit, wherein the memory stores instructions that, when executed, cause the processor to obtain wireless network information collected at a plurality of points through the communication circuit, determine a serviceable radius based on the wireless fingerprint information and the wireless network information, and transmit a threshold value determined based on the serviceable radius to the electronic device through the communication circuit.

Method for variable geofencing and electronic device thereof

A continuous communication apparatus includes a communication interface configured for contactless communication with a different electronic device; and a processor configured to detect a trigger to initiate contactless communication with the different electronic device; determine a communication type associated with communication to be performed with the different electronic device upon detecting the trigger; set at least one parameter associated with continuous communication when the communication type is the continuous communication; and perform the continuous communication with the different electronic device on the basis of the configured parameter.

A data transmission and reception method and apparatus in a Multiple-Input Multiple-Output (MIMO) system. The transmission method includes selecting at least one antenna for use in transmission among a plurality of antennas based on transmission data and transmitting the transmission data through the selected antenna. The data transmission and reception method and apparatus are advantageous in increasing the throughput of the MIMO communication system. Also, the data transmission and reception method and apparatus are capable of making it possible to design a superior transceiver in complexity and performance. Also, the data transmission and reception method and apparatus are capable of acquiring extra Degree of Freedom (DOF) and thus increasing the number of symbols that can be transmitted at a time. Furthermore, the data transmission and reception method and apparatus are applicable to conventional MIMO communication systems to obtain extra performance gain without being restricted to certain conditions.

Data transmission and reception method and apparatus for use in MIMO system

A data transmission and/or reception method of a base station in a wireless communication system is provided. The data transmission/reception method includes receiving information on interference measured by a terminal, allocating a downlink resource to a terminal based on the received interference information, determining per-subband transmit power distributions of the downlink resource allocation, and transmitting the per-subband transmit power distributions of the downlink resource allocation to neighbor base stations.

Inter-cell interference coordination method and apparatus for use in mobile communication system

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Gyeonggi-do, South Korea

Sanguk Park