Lawrence Livermore National Security, LLC

Sangtae Park

Lars F Voss

Stephen E Sampayan

Satinderpall Singh Pannu

Adam M Conway

George James Caporaso

Rebecca J Nikolic

Mihail Bora

Hoang Tan Nguyen

The present disclosure relates to a gyroscope that makes use of a shuttle having a first plurality of fingers, a stator having a second plurality of fingers, at least one fixed support structure, and a plurality of flexors for supporting the shuttle for vibratory motion relative to the stator. The fingers of the shuttle are able to move in a vibratory motion adjacent the fingers of the stator without contacting the fingers of the stator. Portions of the fingers of at least one of the shuttle and the stator also make use of a grounded metal material layer to reduce parasitic capacitive coupling between the fingers of the shuttle and the fingers of the stator.

MEMS metal-quartz gyroscope

A photoconductive switch consisting of an optically actuated photoconductive material, e.g. a wide bandgap semiconductor such as SiC, situated between opposing electrodes. The electrodes are created using various methods in order to maximize reliability by reducing resistive heating, current concentrations and filamentation, and heating and ablation due to the light source. This is primarily accomplished by the configuration of the electrical contact geometry, choice of contacts metals, annealing, ion implantation, creation of recesses within the SiC, and the use of coatings to act as encapsulants and anti-reflective layers.

Reliable electrical contacts for high power photoconductive switches

Growing community of inventors

San Ramon, CA, United States of America

Sangtae Park