Samsung Electronics Co., Ltd.

Sangkuk Kim

Oik Kwon

Yunseung Kang

Sujin Jeon

Jungik Oh

A memory device including a plurality of first conductive lines arranged on a substrate and spaced apart from each other in a first direction parallel to a top surface of the substrate; a plurality of capping liners on sidewalls of each of the plurality of first conductive lines, the plurality of capping liners having top surfaces at a vertical level equal to top surfaces of the plurality of first conductive lines, and bottom surfaces at a vertical level higher than bottom surfaces of the plurality of first conductive lines; and an insulating layer on the substrate, the insulating layer filling spaces between the plurality of first conductive lines and covering sidewalls of the plurality of capping liners.

Growing community of inventors

Seongnam-si, South Korea

Sangkuk Kim