Samsung Electronics Co., Ltd.

Sangkoo Kang

Donghyun Roh

Sungsoo Kim

Sunki Min

Koungmin Ryu

Iksoo Kim

Jongmin Baek

Wookyung You

Sangshin Jang

Seunggwang Kim

A semiconductor device including a first conductive layer on a substrate, a second conductive layer on the first conductive layer, a contact structure between the first and second conductive layers, and a barrier structure surrounding a lower region of a side surface of the second conductive layer, wherein the contact structure includes a contact conductive layer having a first upper surface portion and a second upper surface extending from the first upper surface portion and being concave, and a gap-fill pattern fills a space between the second upper surface portion and the second conductive layer and includes a first gap-fill insulating layer including a metal element and a second gap-fill insulating layer including a silicon element, and the barrier structure includes a first etch stop layer and a barrier layer that include same materials as the first insulating material and the second insulating material, respectively, may be provided.

Semiconductor devices

A method includes: forming a sacrificial gate structure on the active region; forming a spacer structure including a first spacer, a second spacer, and an air-gap spacer, the air-gap spacer capped by bending an upper portion of the second spacer toward an upper portion of the first spacer; forming an insulating structure on the sides of the spacer structure; forming a gap region; and forming a gate structure including a gate dielectric layer, a gate electrode, and a gate capping layer in the gap region. The upper portion of the second spacer is in physical contact with the upper portion of the first spacer on a contact surface, and a lowermost end of the contact surface is on a level higher than an upper surface of the gate electrode with the substrate being a reference base level.

Method of forming a semiconductor device with capped air-gap spacer

A semiconductor device includes a gate structure including a gate electrode, a gate spacer layer on a side surface of the gate electrode, and a gate capping layer on the gate electrode. Moreover, the semiconductor device includes a source/drain region on at least one side of the gate structure, a contact plug on the source/drain region, and first and second insulating films between the contact plug and the gate structure and defining an air gap. The first insulating film includes a first surface, and a second surface extending from the first surface while forming a first angle. The second insulating film includes a third surface forming a second angle with the first surface of the first insulating film. The second angle is an acute angle narrower than the first angle. The air gap is defined by the first surface, the second surface, and the third surface.

A semiconductor device includes a substrate including an active region extending in a first direction; a gate structure intersecting the active region and extending in a second direction on the substrate, the gate structure including a gate electrode, a gate capping layer on the gate electrode, and a plurality of spacers on side surfaces of the gate electrode; source/drain regions on the active region on at least one side of the gate structure; a first insulating layer and a second insulating layer on the source/drain regions on at least one side of the gate structure; and contact plugs on the source/drain regions and penetrating the first and second insulating layers. The plurality of spacers include a first spacer on the side surfaces of the gate electrode, an air-gap spacer on an external side surface of the first spacer, and a second spacer on an external side surface of the air-gap spacer An upper portion of the second spacer is bent towards an upper portion of the first spacer and is configured to cap the air-gap spacer.

Growing community of inventors

Yongin-si, South Korea

Sangkoo Kang