Samsung Display Co., Ltd.

Lg Display Co., Ltd.

Sanghoon Ahn

Byoungho Cheong

Byoungkwon Choo

Joowoan Cho

Hyunjin Cho

Jeongkyun Na

Oleg Prudnikov

Seung Hwan Lee

Joo Woan Cho

Seunghwan Lee

Byoung Kwon Choo

Hyojin Kim

JongHyeok Kim

Youngchul Jung

A substrate polishing apparatus includes a support part on which at least one substrate is disposed, a plurality of first moving parts disposed at both opposite sides of the support part in a second direction crossing a first direction, and configured to upwardly extend and reciprocate in the first direction, a second moving part disposed between the plurality of first moving parts in the second direction and connected to an upper side of the first moving parts, a plurality of polishing units disposed at a lower portion of the second moving part and configured to contact an upper surface of the substrate, and a plurality of nozzles disposed at the lower portion of the second moving part and configured to spray slurry to the substrate where the polishing units rotate and revolve along a predetermined trajectory.

Substrate polishing apparatus

A laser optical system including: a beam splitter configured to split a laser beam into a first light and a second light by reflecting a portion of the laser beam and transmitting another portion of the laser beam; a first reflective member located in a path of the first light and reflecting the first light; and a second reflective member located in a path of the first light and reflecting the first light toward the beam splitter after the first light is reflected by the first reflective member, wherein a portion of the first light reflected toward the beam splitter is incident on and passes through the beam splitter and at least partially overlaps the second light.

Laser optical system and laser annealing device including the same

A method of manufacturing a substrate includes: irradiating, along a first path, a laser beam emitted from a source onto a substrate, wherein the substrate includes a target layer of the laser beam, and wherein the substrate is disposed on a stage; and irradiating, along a second path, a portion the laser beam, which was emitted from the source and reached the target layer, by reflecting the laser beam back onto the target layer using a reflection mirror. An area of a second region of the target layer is greater than an area of a first region of the target layer, wherein the laser beam is irradiated along the second path in the second region, and the laser beam is irradiated along the first path in the first region.

Method of manufacturing a substrate having a crystallized layer and a laser crystallizing apparatus for the same

A method of manufacturing a display apparatus includes forming an amorphous silicon layer on a substrate, splitting a first laser beam emitted from a first laser source into a first master beam in a first polarization state and a second master beam in a second polarization state, changing the first polarization state of the first master beam to the second polarization state to output a third master beam having the second polarization state and corresponding to the first master beam having the second polarization state, combining the second master beam with the third master beam to output a merged laser beam, and irradiating the amorphous silicon layer with the merged laser beam to form a polysilicon layer.

Laser annealing apparatus and a method for manufacturing a display apparatus using the laser annealing apparatus

A laser annealing apparatus includes a beam splitter that splits a laser beam emitted from a laser source into a reflection light beam and a transmission light beam, a beam vibrator that makes an irradiation point of the reflection light beam or the transmission light beam vibrate in a predetermined direction, a beam inverter that inverts the reflection light beam or the transmission light beam, and a light collector that collects the reflection light and the transmission light.

Laser annealing apparatus and laser annealing method using the same

A liquid crystal module includes a display panel having an active area; a case top configured to surrounds an edge of an upper surface and edges of a display panel, and having first through holes; a cover bottom configured to support a light guide plate disposed under the display panel; a supporter main configured to support the display panel and the cover bottom; a light source circuit board on which light emitting diodes (LEDs) emitting light to at least one of both sides of the light guide plate are mounted, wherein the light source circuit board is disposed on the supporter main; and fasteners configured to pass through the first through hole of the case top and to couple the case top with the supporter main, wherein at least two of the LEDs are disposed between the fasteners.

Growing community of inventors

Seoul, South Korea

Sanghoon Ahn