Samsung Electronics Co., Ltd.

Sangbeom Park

Sanghun Kim

Junghwan Kim

Jinwook Jung

Tae-hyun Han

Youngduk Suh

Ohkug Kwon

Dongkyeng Han

Kukbin Choi

A semiconductor fabrication apparatus comprising a light source configured to emit light, a substrate stage arranged to receive a substrate exposed to the emitted light, a reticle arranged between the substrate stage and the light source, and a reticle stage arranged to receive the reticle. The reticle stage including a lower plate, an upper plate arranged above the lower plate, an actuator connected to the lower plate configured to move in a direction parallel to the upper plate, a first cable slab arranged between the upper plate and the lower plate and connected to one side of the actuator, and a first cable cover that surrounds an outer periphery of the first cable slab and contacts the lower plate when the first cable slab becomes bent.

Semiconductor fabrication apparatus

Growing community of inventors

Hwaseong-si, South Korea

Sangbeom Park