Samsung Electronics Co., Ltd.

Sanga Bang

Sangmin Kim

Sangkyung Lee

Hyunwoo Lee

Minji Kim

Youngwook Kim

Yong-Jun Ahn

Chul-Jun Park

Chuljun Park

Yongjun Ahn

Gi-Nam Park

Jeonghun Lim

Kyubum Cho

Ginam Park

Min Kyun Lee

Geunhyung Kim

JongJin Ahn

A wafer storage system includes a main rail, an overhead hoist transport (OHT) on the main rail, the OHT being configured to transfer at least one storage case with wafers, an interface port on at least one side of the main rail, an auxiliary rail on one side of the interface port, the auxiliary rail being parallel to the main rail, and the interface port being between the main rail and the auxiliary rail, an auxiliary transport on the auxiliary rail, the auxiliary transport being configured to move along the auxiliary rail and to move the at least one storage case, a storage shelf on at least one side of the auxiliary transport, the storage shelf being configured to store the at least one storage case, and a worktable on one side of the storage shelf, the storage shelf being between the worktable and the auxiliary transport.

Wafer storage system

A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.

Carrier for measurement and wafer transfer system including the same

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Hwaseong-si, South Korea

Sanga Bang