Eugene Technology Co., Ltd.

Sang Young Oh

Sung Ho Kang

Chang Dol Kim

Gyu Ho Choi

A substrate processing system includes: first and second process tubes spaced apart from each other in a first axial direction to provide process spaces independent from each other; a substrate boat on which a plurality of substrates are multiply stacked and which is provided to each of process spaces of the first and second process tubes; and first and second boat elevation units provided to the first and second process tubes, respectively, to elevate the substrate boat, wherein each of the first and second boat elevation units includes an elevation shaft member disposed in a space between the first and second process tubes.

Growing community of inventors

Hwaseong-si, South Korea

Sang Young Oh