Average Co-Inventor Count = 7.45
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (3 from 131,214 patents)
3 patents:
1. 11676824 - Chemical mechanical polishing apparatus for controlling polishing uniformity
2. 10332762 - Chemical liquid supply apparatus and semiconductor processing apparatus having the same
3. 9394509 - Cleaning solution composition and method of cleaning semiconductor device using the same