Korea Advanced Institute of Science and Technology

Samsung Electronics Co., Ltd.

Sang-ouk Kim

Won-Jun Lee

Moon-Gyu Lee

Su-Mi Lee

Ji-Eun Kim

Seung-Ho Nam

Eun-sung Kim

Jeong-ju Park

Shi-yong Yi

Seung-chul Kwon

Sun-Hwa Lee

Jae-Ho You

Seong-Jun Jeong

Kyeong-mi Lee

Yeong-Suk Choi

Bong-Hoon Kim

Bong-hoon Kim

Young-joo Choi

Dong-ok Shin

Duck-hyun Lee

Jin-ah Lee

A method of forming a micropattern, a substrate surface inspection apparatus, a cantilever set for an atomic force microscope, and a method of analyzing a surface of a semiconductor substrate, and a probe tip the method including forming pinning patterns on a semiconductor substrate; forming a neutral pattern layer in spaces between the pinning patterns; and inspecting a surface of a guide layer that includes the pinning patterns and the neutral pattern layer by using an atomic force microscope (AFM).

Cantilever set for atomic force microscopes, substrate surface inspection apparatus including the same, method of analyzing surface of semiconductor substrate by using the same, and method of forming micropattern by using the same

A method for manufacturing an inorganic-nano structure composite, a method for manufacturing a cabon nanotube composite by using the same, and a carbon nanotube composite manufactured by the same are provided. The method for manufacturing the inorganic-nano structure composite comprises a step of doping pentavalent elements on the nanostructure; and a step of growing the inorganic material from the doping points of the pentavalent elements by dipping the nanostructure on which the pentavalent elements are doped into a precursor solution of the inorganic material, and according to the present invention the pentavalent elements such as nitrogen are doped on the nanostructure and is utilized as the crystallization point of the inorganic material, instead of forming the separate coating layer to the organic-based nanostructure, or binding the binding group to the surface.

Method for preparing inorganic-nanostructure composite material, method for preparing carbon nanotube composite using same, and carbon nanotube composite prepared thereby

According to an example embodiment of the present invention, a photoresist pattern is formed on a base substrate including a neutral layer. A sacrifice structure including a first sacrifice block and a second sacrifice block is formed on the base substrate having the photoresist pattern, and the sacrifice structure is formed from a first thin film including a first block copolymer. Thus, a chemical pattern is formed to form a nano-structure. Therefore, the nano-structure may be easily formed on a substrate having a large size by using a block copolymer, and productivity and manufacturing reliability may be improved.

Method of manufacturing nano-structure and method of manufacturing a pattern using the method

A sulfonated poly(arylene sulfone) contains an unsaturated bond. A cross-linked material may be formed from the sulfonated poly(arylene sulfone), and a clay nanocomposite may include the sulfonated poly(arylene sulfone) or the cross-linked material. A fuel cell includes the clay nanocomposite.

Sulfonated poly(arylene sulfone), crosslinked material thereof, clay nanocomposite including the same, and fuel cell including the same

Provided is a method of nano-patterning block copolymers and a method of manufacturing a polarizer using the same. The method of nano-patterning block copolymers includes coating block copolymers on a lower substrate to a predetermined thickness, forming a thickness gradient by patterning the block copolymers to have a predetermined aspect ratio, and aligning self-assembled block copolymers in a direction of the thickness gradient by heat-treating the block copolymers having the thickness gradient.

Method of nano-patterning block copolymers and method of manufacturing polarizer and color filter using the same

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Daejeon, South Korea

Sang-ouk Kim