Samsung Electronics Co., Ltd.

Sang-Kyu Yoon

Sang-Joon Ryu

Hwa-Cheol Lee

Yong-Hwan Cho

To measure an inner temperature of a chamber included in a test handler, self-refresh currents of semiconductor memory devices under test are measured. The semiconductor memory devices are disposed in the chamber and have a function of linear temperature compensated self-refresh (Li-TCSR). Local temperature values are generated based on the self-refresh currents, where each local temperature value indicates a temperature near the corresponding semiconductor memory device of the semiconductor memory devices under test.

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Asan-si, South Korea

Sang-Kyu Yoon