Samsung Electronics Co., Ltd.

Sang Joon Hong

Sang Hyun Park

Oui Serg Kim

Hyun Woo Kim

Sang Don Jang

Seok Heo

Yong Suk Choi

Kyung-Won Kang

Cha Won Koh

Young Il Jang

Kyung Won Seo

Dong-wook Kim

Dong-Wook Kim

Yoo Chang Kim

Ja Choon Koo

Ho Seok Choi

Dong Seok Baek

In Bae Jang

Roger Francisus Mattheus M Hamelinck

Roger Francisus Mattheus Maria Hamelinck

Yong Seok Ihn

Jung Woong Jang

A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Substrate processing apparatus and method of fabricating semiconductor device using the same

A gantry apparatus includes a structure to couple and support an optical system has enhanced rigidity, which minimizes deformation of the structure even if a plurality of optical systems is coupled to the structure. The gantry apparatus includes an optical system, a drive device to drive the optical system, and a structure to couple and support the drive device. The structure includes a plurality of first plates arranged parallel to one another, and a plurality of second plates intersecting the plurality of first plates to define receptive corridors, each of which receives the drive device.

Gantry apparatus

Provided is a barrel support device for supporting a lens barrel. The barrel support device may include a guide frame configured to laterally support the lens barrel and tilt with the lens barrel, a rotation guide on a first end of the guide frame, the rotation guide being ring shaped and configured attach the lens barrel to the guide frame, and a ring-shaped tilting frame configured to support a second end of the guide frame and tilt the guide frame, wherein the guide frame, the rotation guide, and the tilting frame are configured to allow the lens barrel to pass therethrough.

Lens barrel support device and maskless exposure apparatus having the same

According to an example embodiment, a position arrangement device includes at least one joint module between a first base and a second base. The at least one joint module is configured to adjust a position of the second base relative to the first base based on elastic flexion in the joint module.

Position arrangement device and joint module thereof

An actuator according to example embodiments may be relatively compact and may be driven with 2 degrees of freedom with less spatial constraints. The actuator may include a base member, a ball screw member including a ball screw coupled to the base member and a ball nut screwed onto the ball screw, a driving member coupled to the ball nut so as to move in conjunction with the ball nut, a first directional displacement member configured to move in a first direction in response to a first movement of the driving member, a wedge member coupled to the driving member so as to be moved in a second direction in response to a second movement of the driving member, a second directional displacement member configured to move in a second direction in conjunction with the wedge member, and a binding member configured to bind the first directional displacement member to at least one of the driving member, the wedge member, and the base member.

Actuator, stage device, and exposure apparatus

Growing community of inventors

Suwon-si, South Korea

Sang Joon Hong