Average Co-Inventor Count = 6.15
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (2 from 131,214 patents)
2 patents:
1. 11887868 - Substrate processing apparatus and apparatus for manufacturing integrated circuit device
2. 11664243 - Substrate processing apparatus