Other

Sang Hyo Han

Jeong Hyun Park

Hyun Seok Choi

A core insertion type spiral tube includes: a spiral metal tube having an empty space therein; and an elastic core member positioned inside said spiral metal tube.

Core insertion type spiral tube and making method for the same

Provided are a retainer ring for polishing a wafer and a method of manufacturing the retainer ring, in which an outer circumferential surface of the wafer is retained during an operation of polishing a wafer by using a chemical mechanical polishing (CMP) method. In detail, a retainer ring may be manufactured at relatively low costs. In addition, a method of manufacturing a retainer ring for polishing a wafer, which may be produced at relatively low costs, may be provided.

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Suwon-si, South Korea

Sang Hyo Han