Samsung Display Co., Ltd.

Dongwoo Fine-chem Co., Ltd.

Samsung Electronics Co., Ltd.

Sang-Hoon Jang

Young-Chul Park

Joon-Woo Lee

Young-Jun Jin

Sang-tae Kim

In-Ho Yu

Suck-Jun Lee

Hong-Sick Park

O-Byoung Kwon

Min-Ki Lim

Young-Jin Yoon

Jong-Hyun Choung

Seon-Il Kim

Yu-Jin Lee

Byeong-Jin Lee

Wang-Woo Lee

Seung-Jae Yang

Kyong-Min Kang

Dong-Ki Kim

Bong-Kyun Kim

Shin-Il Choi

Wang Woo Lee

Ji-Young Park

In-Bae Kim

Jae-Woo Jeong

In Seol Kuk

Hye-Ra Shin

Keyong Bo Shim

Sang-Gab Kim

Sang Gab Kim

Sun-Young Hong

Seung-yong Lee

Young-Joo Choi

Hyun-Kyu Lee

Hong-Sik Park

Nam-Seok Suh

Kyung-Bo Shim

Ky-Sub Kim

A etchant composition that includes, based on a total weight of the etchant composition, about 0.5 wt % to about 20 wt % of a persulfate, about 0.5 wt % to about 0.9 wt % of an ammonium fluoride, about 1 wt % to about 10 wt % of an inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 10.0 wt % of a sulfonic acid, about 5 wt % to about 10 wt % of an organic acid or a salt thereof, and a remainder of water. The etchant composition may be configured to etch a metal layer including copper and titanium, to form a metal wire that may be included in a thin film transistor array panel of a display device.

Etchant composition and method of forming metal wire and thin film transistor array panel using the same

An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.

Etchant, display device and method for manufacturing display device using the same

An etching composition and a method of manufacturing a display substrate using the etching composition are disclosed. The etching composition includes phosphoric acid (HPO) of about 40% by weight to about 70% by weight, nitric acid (HNO) of about 5% by weight to about 15% by weight, acetic acid (CHCOOH) of about 5% by weight to about 20% by weight, and a remainder of water. Thus, a metal layer including copper may be stably etched.

Etching composition and method of manufacturing a display substrate using the system

Exemplary embodiments of the present invention disclose a non-halogenated etchant for etching an indium oxide layer and a method of manufacturing a display substrate using the non-halogenated etchant, the non-halogenated etchant including nitric acid, sulfuric acid, a corrosion inhibitor including ammonium, a cyclic amine-based compound, and water.

Non-halogenated etchant and method of manufacturing a display substrate using the non-halogenated etchant

An etchant composition for etching a transparent electrode is provided, the etchant composition includes an inorganic acid, an ammonium (NH)-containing compound, a cyclic amine compound, and the remaining amount of water.

Method of etching a pixel electrode

Etching composition for etching a transparent electrode

An etchant according to exemplary embodiments of the present invention includes about 0.5 wt % to about 20 wt % of persulfate, about 0.01 wt % to about 2 wt % of a fluorine compound, about 1 wt % to about 10 wt % of inorganic acid, about 0.5 wt % to about 5 wt % of a cyclic amine compound, about 0.1 wt % to about 5 wt % of a chlorine compound, about 0.05 wt % to about 3 wt % of copper salt, about 0.1 wt % to about 10 wt % of organic acid or organic acid salt, and water.

Echtant and method for manufacturing display device using the same

An etchant composition is provided. The etchant composition includes about 40 to about 65 wt % of phosphoric acid, about 2 to about 5 wt % of nitric acid, about 2 to about 20 wt % of acetic acid, about 0.1 to about 2 wt % of a compound containing phosphate, about 0.1 to about 2 wt % of a compound simultaneously containing an amino group and a carboxyl group, and a remaining weight percent of water for the total weight of the composition.

Etchant composition, and method of fabricating metal pattern and thin film transistor array panel using the same

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Jeonju-si, South Korea

Sang-Hoon Jang