Samsung Electronics Co., Ltd.

Sang-Cheol Ha

Min-Chul Kim

Cheol-Kyu Yang

Byung-Ho Ahn

Seog-Min Lee

Sung-Ho Kang

Yong-Kyu Joo

Gon-Su Kang

Chul-Young Jang

Yong-hun Lee

Sun-Hong Choi

Sun-Ho Ryu

Kwang-jun Lee

Dong-Min Son

Ju-Hong Lee

Du-Han Jeon

An arc lamp includes an arc tube configured to receive a reaction gas therein, and an anode and a cathode disposed opposite one another within the arc tube and configured to generate an electrical arc. The anode includes an anode head portion extending inwardly from an end portion of the arc tube, and an anode tip portion bonded to the anode head portion and comprising a trench extending in a top surface along a peripheral region of the anode tip portion.

Arc lamp and substrate heating apparatus having the arc lamp

A batch type apparatus may include a tube; a boat configured to receive a plurality of semiconductor substrates, the boat vertically moved into the tube; a gas nozzle vertically arranged in the tube, the tube having a first portion and a second portion upwardly extended from the first portion; a gas pipe for supplying reaction gases to the gas nozzle, the gas pipe having a horizontal extension and a vertical extension, and the vertical extension extended in the gas nozzle; a fixing member for fixing the first portion of the gas nozzle to the gas pipe, the fixing member having strength higher than that of the gas nozzle; and a clamping member for clamping the gas pipe to the tube. Therefore, breakage of the gas nozzle may be suppressed.

Batch type apparatus for manufacturing semiconductor devices

Growing community of inventors

Suwon-si, South Korea

Sang-Cheol Ha