Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Applied Materials, Inc. (2 from 13,713 patents)
2 patents:
1. 9735002 - Integrated apparatus for efficient removal of halogen residues from etched substrates
2. 7655571 - Integrated method and apparatus for efficient removal of halogen residues from etched substrates