Nikon Corporation

Sandy Lee

Alex Ka Tim Poon

Pai-Hsueh Yang

Gaurav Keswani

Rocky Mai

Yeong-Jun Choi

A stage assembly () includes a stage (), and a fluid actuator assembly () that moves the stage (). The fluid actuator assembly () includes a piston housing () that defines a piston chamber (); (ii) a piston () that separates the piston chamber () into a first chamber (A) and a second chamber (B); (iii) a supply valve (C) that controls the flow of the working fluid () into the first chamber (A); and (iv) an exhaust valve (D) that controls the flow of the working fluid () out of the first chamber (A). The supply valve (C) has a supply orifice (G) having a supply orifice area, and the exhaust valve (D) has an exhaust orifice (G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (A), (B).

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Dublin, CA, United States of America

Sandy Lee