Varian, Inc.

Sandro Vittozzi

Roberto Carboneri

A device and a method provide a detection of a presence of a test gas. The device comprises a vacuum chamber connected to a vacuum pump equipped with an electronic power supply unit. At least one portion of the chamber is separated from a surrounding outside environment by a membrane selectively permeable to the test gas. A gas flow from the outside environment is guided forcefully over the surface of the membrane via a flow conveyor, which comprises an inlet duct, a diffuser and an outlet duct. The presence of any test gas is detected by the changes in the electrical current to the vacuum pump provided by the power supply.

Device and method for detecting the presence of test gas

A gas-selective permeable membrane () utilisable in a leak detector for a gas, more particularly helium, comprising a sheet-like body () on which at least one reduced thickness area () is defined by removing a material from the sheet-like body. This at least one reduced thickness area () being permeable to at least one gas and formed so as that it is partly surrounded by a thicker and substantially gas-impermeable area () ensuring the structural strength of the membrane.

Gas-selective permeable membrane and method of manufacturing thereof

A leak detector comprises a high vacuum envelope connected with a vacuum pump to bring the vacuum envelope to a pressure sensibly lower than ambient pressure. At least a portion of the envelope is separated from an external environment through a quartz membrane associated with an electrical resistor, which heats the membrane to a sufficient temperature in order to make it permeable to a corresponding test gas (in particular, helium). In operation, an electronic control unit detects variations in the current absorbed by the vacuum pump and consequently signals the test gas diffusion into the chamber and hence the existence of a leak. A sampling line with a sampling pump disposed therein is connected to a probe for the intake of gas directed to expose to the membrane. The gas is discharged to the outside through a discharge line. A system for switching between the gas intake and exhaust is provided, in order to quickly eliminates any test gas trace from said detector. Purging cycle actuation is provided manually or automatically.

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Turin, Italy

Sandro Vittozzi