Freescale Semiconductor,inc.

Sandra J Wipf

Dragan Zupac

Theresa M Keller

Joel M Keys

Evan F Yu

Brian D Griesbach

Olin L Hartin

Radu Mircea Secareanu

Elizabeth C Glass

Suman K Banerjee

A semiconductor amplifier is provided comprising, a substrate and one or more unit amplifying cells (UACs) formed on the substrate, wherein each UAC is laterally surrounded by a first lateral dielectric filled trench (DFT) isolation wall extending at least to the substrate and multiple UACs are surrounded by a second lateral DFT isolation wall of similar depth outside the first isolation walls, and further semiconductor regions lying between the first isolation walls when two or more unit cells are present, and/or lying between the first and second isolation walls, are electrically floating with respect to the substrate. This reduces the parasitic capacitance of the amplifying cells and improves the power added efficiency. Excessive leakage between buried layer contacts when using high resistivity substrates is avoided by providing a further semiconductor layer of intermediate doping between the substrate and the buried layer contacts.

High efficiency amplifier with reduced parasitic capacitance

A power transistor () comprises a plurality of unit cell devices (), a base contact configuration, an emitter contact configuration, and a collector contact configuration. The plurality of unit cell devices is arranged along an axis (), each unit cell device including base (), emitter (), and collector () portions. The base contact configuration includes (i) a first base feed () coupled to the base portion of each unit cell device via a first end of at least one base finger () associated with a corresponding unit cell device and (ii) a second base feed () coupled to the base portion of each unit cell device via an opposite end of the at least one base finger associated with the corresponding unit cell device. The emitter contact configuration includes (i) a first emitter feed () coupled to the emitter portion of each unit cell device via a first end of an emitter metallization () associated with a corresponding unit cell device and (ii) a second emitter feed () coupled to the emitter portion of each unit cell device via an opposite end of the emitter metallization associated with the corresponding unit cell device. The collector contact configuration includes a collector feed () coupled to the collector portion of each unit cell device.

Power transistor featuring a double-sided feed design and method of making the same

Flip-chip electronic devices () employ bumps () for coupling to an external substrate. Device cells () and bumps () are preferably arranged in clusters () where four bumps () substantially surround each device cell () or form a cross with the device cell () at the intersection of the cross. The bumps () are desirably spaced apart by the minimum allowable bump () pitch (L). Typically, each device cell () contains one or more active device regions () depending on the overall function. Complex devices () are formed by an X-Y array of the clusters (), where adjacent clusters () may share bumps () and/or device cells (). In a preferred embodiment, the bumps () form the outer perimeter () of the device (). The maximum device temperature and overall noise is reduced.

Electronic device with connection bumps

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Austin, TX, United States of America

Sandra J Wipf